Patents by Inventor Bryant A. Campbell

Bryant A. Campbell has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate loading means for a chemical vapor deposition apparatus
    Patent number: 4524719
    Abstract: A controlled temperature deposition device comprising an inner reaction chamber having gas distribution means for introducing gas into inner chamber and removing gas therefrom and a vacuum chamber means surrounding the inner deposition chamber and spaced from the walls thereof for maintaining a medium vacuum therein. Associated with the deposition device is a substrate loading and unloading fork which transfers substrates such as wafer boats from outside the device to a position in the inner deposition chamber and removes them from the inner deposition chamber following deposition.
    Type: Grant
    Filed: September 6, 1983
    Date of Patent: June 25, 1985
    Assignee: Anicon, Inc.
    Inventors: Bryant A. Campbell, Dale R. DuBois, Ralph F. Manriquez, Nicholas E. Miller