Patents by Inventor Bu-Fun Chen

Bu-Fun Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for increasing polysilicon granin size
    Publication number: 20040224533
    Abstract: The present invention relates to a method for increasing the grain size of a polysilicon layer, which includes exposing a silicon oxide wafer in a deposition chamber to an amount, effective for the purpose, of nitrogen at a flow rate of at least about 240 standard liters per minute (slm).
    Type: Application
    Filed: May 7, 2003
    Publication date: November 11, 2004
    Inventors: Yao-Hui Huang, Tung-Li Lee, Chih-Hao Lin, Yen-Fei Lin, James Sun, Bu-Fun Chen, David Huang