Patents by Inventor Bu-Jin Ko
Bu-Jin Ko has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Publication number: 20110024527Abstract: A gas injector includes: a plate including at least one first injection hole; and at least one nozzle module combined with the plate, the at least one nozzle module including at least one second injection hole connected to the at least one first injection hole.Type: ApplicationFiled: October 13, 2010Publication date: February 3, 2011Applicant: JUSUNG ENGINEERING CO., LTD.Inventors: Geun-Jo HAN, Jeong-Beom LEE, Bu-Jin KO
-
Patent number: 7846292Abstract: A gas injector includes: a plate including at least one first injection hole; and at least one nozzle module combined with the plate, the at least one nozzle module including at least one second injection hole connected to the at least one first injection hole.Type: GrantFiled: March 31, 2006Date of Patent: December 7, 2010Assignee: Jusung Engineering Co., Ltd.Inventors: Geun-Jo Han, Jeong-Beom Lee, Bu-Jin Ko
-
Patent number: 7156950Abstract: A gas diffusion plate supplying process gases into a chamber of an ICP (inductively coupled plasma) etcher is provided in the present invention. The gas diffusion plate includes a porous plate comprised of a plurality of balls and formed by compressing and curing the plurality of balls, the porous plate having a circular planar shape; a plurality of gas flow grooves formed on an upper surface of the porous plate; and a gas distribution plate having a plurality of gas-feed holes at the bottom thereof and a plurality of gas-feed passages in the side portion thereof, the gas distribution plate surrounding lower and side portions of the porous plate.Type: GrantFiled: January 21, 2003Date of Patent: January 2, 2007Assignee: Jusung Engineering Co., LtdInventors: Hong-Seub Kim, Bu-Jin Ko
-
Publication number: 20060219362Abstract: A gas injector includes: a plate including at least one first injection hole; and at least one nozzle module combined with the plate, the at least one nozzle module including at least one second injection hole connected to the at least one first injection hole.Type: ApplicationFiled: March 31, 2006Publication date: October 5, 2006Inventors: Geun-Jo Han, Jeong-Beom Lee, Bu-Jin Ko
-
Patent number: 6917508Abstract: An apparatus for manufacturing a semiconductor device includes a chamber, upper and lower electrodes spacing apart and facing each other in the chamber, the upper and lower electrodes supplied with high frequency power to form plasma, an electrostatic chuck on the lower electrode and settling a substrate thereon, a chuck base between the electrostatic chuck and the lower electrode, and protecting the electrostatic chuck, and a helium line supplying helium gas to a gap between the substrate and the electrostatic chuck, the helium line filled with a plurality of fine insulating balls.Type: GrantFiled: May 22, 2003Date of Patent: July 12, 2005Assignee: Jusung Engineering Co., Ltd.Inventors: Joung-Sik Kim, Bu-Jin Ko
-
Patent number: 6847516Abstract: An electrostatic chuck includes: a metal plate; a dielectric layer on the metal plate, the dielectric layer and the metal plate having a lift pin hole and an injection hole of a cooling gas; a lift pin moving up-and-down through the lift pin hole; first protection insulator on an inner surface of the lift pin hole; and second protection insulator on an inner surface of the injection hole.Type: GrantFiled: September 4, 2002Date of Patent: January 25, 2005Assignee: Jusung Engineering Co., Ltd.Inventors: Gi-Chung Kwon, Hong-Sik Byun, Sung-Weon Lee, Hong-Seub Kim, Sun-Seok Han, Bu-Jin Ko, Joung-Sik Kim
-
Patent number: 6770836Abstract: An impedance matching circuit for a plasma source includes: a first network including: a first coil; and a RF power supply applying a first voltage to the first coil; and a second network including; a second coil grounded having a second voltage, the second voltage being lower than the first voltage; first and second reactive elements, one end portion of the first and second reactive elements being connected to each end portion of the second coil, respectively; and a load connected to the other end portions of the first and second reactive elements, phases at two end portions of the load being different from each other.Type: GrantFiled: March 19, 2002Date of Patent: August 3, 2004Assignee: Jusung Engineering Co., Ltd.Inventors: Gi-Chung Kwon, Hong-Sik Byun, Sung-Weon Lee, Hong-Seub Kim, Sun-Seok Han, Bu-Jin Ko, Joung-Sik Kim
-
Publication number: 20040005730Abstract: A controller module for a semiconductor manufacturing device wherein the controller module has a plurality of controllers comprises a control box disposed at an outside of the semiconductor manufacturing device wherein each of the plurality of controllers is separately installed into the control box, and a movable control box support wherein the control box is loaded on the control box support and slides on the control box support.Type: ApplicationFiled: February 25, 2003Publication date: January 8, 2004Inventor: Bu-Jin Ko
-
Publication number: 20040003898Abstract: An apparatus for manufacturing a semiconductor device includes a chamber, upper and lower electrodes spacing apart and facing each other in the chamber, the upper and lower electrodes supplied with high frequency power to form plasma, an electrostatic chuck on the lower electrode and settling a substrate thereon, a chuck base between the electrostatic chuck and the lower electrode, and protecting the electrostatic chuck, and a helium line supplying helium gas to a gap between the substrate and the electrostatic chuck, the helium line filled with a plurality of fine insulating balls.Type: ApplicationFiled: May 22, 2003Publication date: January 8, 2004Inventors: Joung-Sik Kim, Bu-Jin Ko
-
Patent number: 6653988Abstract: Disclosed is a parallel resonance antenna comprising: a whirl antenna having a plurality of antenna units installed two-dimensionally and radially around a central point, each of the antenna units having a ground point at a predetermined position thereof, portions outside the ground points respectively being bent in a same direction, the antenna units having a same size and direction, angles between the antenna units at the central point being all the same; a central conductive line connected to the central point to be normal to the whirl antenna, for being supplied with an RF power; a metal plate installed over and apart from the whirl antenna, the metal plate being connected with end portions of the antenna units, and having a penetration hole through which the central conductive line passes without contacting with the metal plate; and a variable resonance capacitor installed in series between the central conductive line and the metal plate.Type: GrantFiled: June 27, 2002Date of Patent: November 25, 2003Assignee: Jusung Engineering, Co., LTDInventors: Gi Chung Kwon, Hong Sik Byun, Sung Weon Lee, Hong Seub Kim, Sun Seok Han, Bu Jin Ko, Joung Sik Kim
-
Publication number: 20030136516Abstract: A gas diffusion plate supplying process gases into a chamber of an ICP (inductively coupled plasma) etcher is provided in the present invention. The gas diffusion plate includes a porous plate comprised of a plurality of balls and formed by compressing and curing the plurality of balls, the porous plate having a circular planar shape; a plurality of gas flow grooves formed on an upper surface of the porous plate; and a gas distribution plate having a plurality of gas-feed holes at the bottom thereof and a plurality of gas-feed passages in the side portion thereof, the gas distribution plate surrounding lower and side portions of the porous plate.Type: ApplicationFiled: January 21, 2003Publication date: July 24, 2003Inventors: Hong-Seub Kim, Bu-Jin Ko
-
Publication number: 20030066605Abstract: An air exhaust system of a chamber for manufacturing a semiconductor device comprises a chamber, a chuck formed vertically through a bottom of the chamber, a plurality of openings arranged around the chuck with a same area and a same distance each other, a plurality of outlet ducts having a same area and a length, one end of each of the outlet duct being connected respectively to each of the openings, a buffer system connecting the other end of each of the outlet duct into one, a gate valve connected to the buffer system, an auto pressure controller connected to the gate valve, a turbo pump connected to the auto pressure controller for exhausting gaseous material of an interior of the chamber, and a scrubber connected to the turbo pump for filtering and discharging the gaseous material of the interior of the chamber.Type: ApplicationFiled: October 4, 2002Publication date: April 10, 2003Inventors: Bu-Jin Ko, Jung-Sik Kim, Sun-Seok Han
-
Publication number: 20030043530Abstract: An electrostatic chuck includes: a metal plate; a dielectric layer on the metal plate, the dielectric layer and the metal plate having a lift pin hole and an injection hole of a cooling gas; a lift pin moving up-and-down through the lift pin hole; first protection insulator on an inner surface of the lift pin hole; and second protection insulator on an inner surface of the injection hole.Type: ApplicationFiled: September 4, 2002Publication date: March 6, 2003Inventors: Gi-Chung Kwon, Hong-sik Byun, Sung-Weon Lee, Hong-Seub Kim, Sun-Seok Han, Bu-Jin Ko, Joung-Sik Kim
-
Publication number: 20030001792Abstract: Disclosed is a parallel resonance antenna comprising: a whirl antenna having a plurality of antenna units installed two-dimensionally and radially around a central point, each of the antenna units having a ground point at a predetermined position thereof, portions outside the ground points respectively being bent in a same direction, the antenna units having a same size and direction, angles between the antenna units at the central point being all the same; a central conductive line connected to the central point to be normal to the whirl antenna, for being supplied with an RF power; a metal plate installed over and apart from the whirl antenna, the metal plate being connected with end portions of the antenna units, and having a penetration hole through which the central conductive line passes without contacting with the metal plate; and a variable resonance capacitor installed in series between the central conductive line and the metal plate.Type: ApplicationFiled: June 27, 2002Publication date: January 2, 2003Applicant: Jusung Engineering Co., Ltd.Inventors: Gi Chung Kwon, Hong Sik Byun, Sung Weon Lee, Hong Seub Kim, Sun Seok Han, Bu Jin Ko, Joung Sik Kim
-
Publication number: 20020189763Abstract: Disclosed is a plasma process apparatus in which a semiconductor device manufacturing process using a plasma is performed. The apparatus includes: a vacuum chamber in which a semiconductor device manufacturing process is performed; a very high frequency (VHF) power source for generating a VHF power; a VHF parallel resonance antenna having a plurality of antenna coils connected in parallel to each other, and multiple variable capacitors insertion-installed in series in the antenna coils, the antenna being installed at an outer upper portion of the vacuum chamber, and supplied with the VHF power from the VHF power source; and an impedance matching box for impedance matching between the VHF power and the VHF parallel resonance antenna.Type: ApplicationFiled: June 17, 2002Publication date: December 19, 2002Applicant: Jusung Engineering Co., Ltd.Inventors: Gi Chung Kwon, Hong Sik Byun, Sung Weon Lee, Hong Seub Kim, Sun Seok Han, Bu Jin Ko, Joung Sik Kim
-
Publication number: 20020130110Abstract: An impedance matching circuit for a plasma source includes: a first network including: a first coil; and a RF power supply applying a first voltage to the first coil; and a second network including; a second coil grounded having a second voltage, the second voltage being lower than the first voltage; first and second reactive elements, one end portion of the first and second reactive elements being connected to each end portion of the second coil, respectively; and a load connected to the other end portions of the first and second reactive elements, phases at two end portions of the load being different from each other.Type: ApplicationFiled: March 19, 2002Publication date: September 19, 2002Inventors: Gi-Chung Kwon, Hong-Sik Byun, Sung-Weon Lee, Hong-Seub Kim, Sun-Seok Han, Bu-Jin Ko, Joung-Sik Kim