Abstract: A vacuum apparatus temperature sensor assembly for measuring the temperature of a vacuum apparatus and a method are disclosed. The vacuum apparatus temperature sensor assembly comprises: a sheet substrate configured to conform to a shape of an item, equipment or apparatus whose temperature is to be determined; and a temperature sensor thermally coupled with the sheet substrate, wherein the sheet substrate is configured to provide a thermal path from the apparatus to the temperature sensor. In this way, the substrate provides a larger area than that of the temperature sensor to couple with the apparatus which enables the average temperature of the apparatus to be more reliably and accurately conveyed to the temperature sensor and make the temperature measurements less reliant on the exact placing of the temperature sensor with respect to the apparatus.

Abstract: There is provided a method of detecting the temperature of a component of a support system for semiconductor processing equipment, the method comprising: applying a radio frequency identity tag to the component, the radio frequency identity tag having a serial number; reading the radio frequency identity tag with a reader, the reader arranged to read the serial number of the radio frequency identity tag, and to identify the resonant frequency of the radio frequency identity tag; and converting the resonant frequency of the radio frequency tag to a temperature of the radio frequency identity tag.

Abstract: A fault indicating circuit for an electric heater has a first branch to conduct a supply of electrical ,energy to the electrical heater and includes a temperature sensitive device to interrupt the supply of electrical energy to the electric heater when exposed to a temperature exceeding a set temperature. The fault detecting circuit has a second branch that includes at least an element of a fault indicating device. The first branch has a first resistance R1, the second branch has a second resistance R2 and the two branches are, electrically in parallel.

Abstract: An inline fluid heater is disclosed, comprising: an inlet operable to receive a fluid to be heated; a substrate defining at least one conduit fluidly coupled with the inlet to receive the fluid; a positive thermal coefficient heater thermally coupled with the substrate and operable to heat the substrate to provide a heated fluid by heating the fluid within the at least one conduit; and an outlet fluidly coupled with the at least one conduit and operable to provide the heated fluid. In this way, a compact, cost-effective and efficient heater is provided which avoids the need for safety devices or safety circuits, as the positive thermal co-efficient heaters are self-limiting.

Abstract: A process equipment heating system has a group of electric heaters and a heater checking system. The heater checking system is configured to determine a resistance value R1 for the group of electric heaters, compare the resistance value R1 with a reference resistance value RR and judge a fault condition if the resistance value R1 differs from the reference resistance value RR by more than a predetermined amount.

Abstract: A process equipment heating system has a group of electric heaters and a heater checking system. The heater checking system is configured to determine a resistance value R1 for the group of electric heaters, compare the resistance value R1 with a reference resistance value RR and judge a fault condition if the resistance value R1 differs from the reference resistance value RR by more than a predetermined amount.

Abstract: The invention is directed to a pipe heater which includes a heater body to be secured against a pipe, a securing strap system operable to secure the heater body to the: pipe and a self-amalgamating material element provided on the pipe heater to be engaged with a compatible material portion of the pipe heater to lock the securing strap system in a securing condition. The heater body is provided with at least one heating element.

Abstract: A fault indicating circuit for an electric heater has a first branch to conduct a supply of electrical ,energy to the electrical heater and includes a temperature sensitive device to interrupt the supply of electrical energy to the electric heater when exposed to a temperature exceeding a set temperature. The fault detecting circuit has a second branch that includes at least an element of a fault indicating device. The first branch has a first resistance R1, the second branch has a second resistance R2 and the two branches are, electrically in parallel.