Abstract: In order to achieve higher contact quality for backside power distribution networks, provided is a backside contact to a semiconductor device having a positive slope and a dielectric sidewall liner, and methods for making the same.

Abstract: Provided is a semiconductor chip architecture including a wafer, a front-end-of-line (FEOL) layer on a first side of the wafer, the FEOL layer including a semiconductor device and an interlayer dielectric (ILD) structure on the semiconductor device on the first side of the wafer, a shallow trench isolation (STI) structure in the wafer, and the wafer, a middle-of-line (MOL) layer provided on the first FEOL layer, the MOL layer including a contact and a via connected to the contact, an insulating layer on the first side of the wafer and adjacent to the via in a horizontal direction, a power rail penetrating the wafer from a second side of the wafer opposite to the first side, wherein the via extends through the ILD structure, the STI structure, and the wafer in a vertical direction to contact the power rail.

Abstract: Provided is a semiconductor device that includes: a 1st carrier wafer; and a 1st semiconductor chip on the 1st carrier wafer, wherein the 1st carrier wafer includes at least one 1st pattern, and the 1stpattern includes therein a 1st stress material which is different from a material forming the 1st carrier wafer, and configured to expand or shrink by thermal processing.

Abstract: Integrated circuit devices may include a transistor, a passive device, a substrate extending between the transistor and the passive device and a power rail. The passive device may be spaced apart from the substrate. Each of the passive device and the power rail may have a first surface facing the substrate, and the first surface of the passive device is closer than the first surface of the power rail to the substrate.