Abstract: Disclosed herein is a multi-channel device for detecting plasma at an ultra-fast speed, including: a first antenna module connected to a first output terminal in contact with a substrate on a chuck of a process chamber and extending to ground, and receiving a first leakage current leaking through the substrate to increase reception sensitivity of the leakage current; a first current detection module detecting the first leakage current; a current measurement module receiving the first leakage current output from the first current detection module, and extracting the received first leakage current for each predetermined period to generate a first leakage current measurement information; and a control module comparing the first leakage current measurement information with a reference value to generate first arcing occurrence information.

Abstract: Disclosed are a method and device for calculating a correlation between notes using a database constructed on a basis of artificial intelligence, and supporting a service for the notes on a basis of the calculated correlation. A method by which a note providing device that interworks with a user terminal provides notes, includes: constructing a keyword DB by extracting a keyword from a note generated through the user terminal and reflecting a weight calculated through machine learning using the extracted keyword; and calculating a correlation score for each of a plurality of target notes correlated with a reference note using the keyword DB. Therefore, the method and device for providing the notes using the artificial intelligence-based correlation calculation can more accurately recommend the correlated notes by reflecting the interaction of the user.

Abstract: Disclosed are a method and device for calculating a correlation between notes using a database constructed on a basis of artificial intelligence, and supporting a service for the notes on a basis of the calculated correlation. A method by which a note providing device that interworks with a user terminal provides notes, includes: constructing a keyword DB by extracting a keyword from a note generated through the user terminal and reflecting a weight calculated through machine learning using the extracted keyword; and calculating a correlation score for each of a plurality of target notes correlated with a reference note using the keyword DB. Therefore, the method and device for providing the notes using the artificial intelligence-based correlation calculation can more accurately recommend the correlated notes by reflecting the interaction of the user.

Abstract: Disclosed are a method and device for calculating a correlation between notes using a database constructed on a basis of artificial intelligence, and supporting a service for the notes on a basis of the calculated correlation. A method by which a note providing device that interworks with a user terminal provides notes, includes: constructing a keyword DB by extracting a keyword from a note generated through the user terminal and reflecting a weight calculated through machine learning using the extracted keyword; and calculating a correlation score for each of a plurality of target notes correlated with a reference note using the keyword DB. Therefore, the method and device for providing the notes using the artificial intelligence-based correlation calculation can more accurately recommend the correlated notes by reflecting the interaction of the user.