Abstract: A substrate treating apparatus is provided. A substrate treating apparatus comprising a chuck supporting a substrate; an edge ring surrounding the chuck; a focus ring positioned on the edge ring; a cover ring surrounding the edge ring and the focus ring; a plasma baffle surrounding a side surface of the cover ring; a first ground ring in contact with a lower surface of the cover ring; and a second ground ring electrically connected to the first ground ring and in contact with the plasma baffle, wherein an upper surface of the first ground ring is placed at a level lower than that of an upper surface of the second ground ring.

Abstract: In an embodiment of the present inventive concept, a high bandwidth memory includes a base die, and a semiconductor stack disposed on the base die, the semiconductor stack comprising a plurality of underfill members and a plurality of memory dies that are alternately stacked. Each of the plurality of underfill members includes first sides, each of the plurality of memory dies includes second sides, and each of the first sides is recessed from a corresponding second side.

Abstract: A touch controller includes a controller receiving a display timing signal and generating a touch sensing control signal synchronously with the display timing signal. The touch controller also includes a sensing circuit driving a touch sensing array in response to the touch sensing control signal in order to generate touch data corresponding to sensing signals provided by the touch sensing array. The sensing circuit provides a first driving signal having a first polarity to at least one driving channel of the touch sensing array during a first display frame period, and provides a second driving signal having a second polarity different from the first polarity during a second display frame period.

Abstract: A plasma processing apparatus includes a plasma chamber, an electrostatic chuck disposed in the plasma chamber and a pressure control ring disposed in the plasma chamber. The pressure control ring includes a body surrounding an electrostatic chuck in a plan view, an exhaust part disposed in a portion of the body along a first direction, the exhaust part configured to induce a flow of gas in the plasma chamber toward the first direction in a plan view, and a blocking part disposed in another portion of the body along a second direction perpendicular to the first direction in a plan view, the blocking part configured to block the flow of the gas in the second direction.

Abstract: A touch controller includes a controller receiving a display timing signal and generating a touch sensing control signal synchronously with the display timing signal. The touch controller also includes a sensing circuit driving a touch sensing array in response to the touch sensing control signal in order to generate touch data corresponding to sensing signals provided by the touch sensing array. The sensing circuit provides a first driving signal having a first polarity to at least one driving channel of the touch sensing array during a first display frame period, and provides a second driving signal having a second polarity different from the first polarity during a second display frame period.

Abstract: A wafer carrier including a case having an opening at one end, slots disposed in the case and receiving wafers, and a wireless communication circuitry disposed on an inner sidewall of the case and configured to detect humidity of a gas contained in the case may be provided. The wireless communication circuitry may be further configured to compare the detected humidity with a threshold humidity predetermined, and transmit a first warning signal to an external host via wireless communication when the detected humidity is greater than the threshold humidity.

Abstract: The present invention relates to a cathode current collector for a solid oxide fuel cell and, more particularly, to a cathode current collector inserted between a cell and a metal separator constituting a unit of a fuel cell stack, and a solid oxide fuel cell comprising the same.

Abstract: A touch screen controller is provided. The touch screen controller includes: an offset cancellation circuit configured to cancel offset capacitance of a touch screen panel including a first channel and a second channel crossing the first channel, the offset cancellation circuit connected to the touch screen panel through a sensing node; a charge amplifier configured to generate a sensing voltage from a sensing signal output from the touch screen panel, the charge amplifier including an amplifier having a first input terminal connected to the sensing node and a second input terminal to which an input voltage is applied; and a channel driver configured to provide a driving voltage, which is equal to or greater than the input voltage, to the second channel in a self capacitance sensing mode for the first channel.

Abstract: A wafer carrier including a case having an opening at one end, slots disposed in the case and receiving wafers, and a wireless communication circuitry disposed on an inner sidewall of the case and configured to detect humidity of a gas contained in the case may be provided. The wireless communication circuitry may be further configured to compare the detected humidity with a threshold humidity predetermined, and transmit a first warning signal to an external host via wireless communication when the detected humidity is greater than the threshold humidity.

Abstract: Provided are substrate processing systems and methods of managing the same. The method may include displaying a notification for a preventive maintenance operation on a chamber, performing a maintenance operation on the chamber, performing a first optical test, and evaluating the preventive maintenance operation. The first optical test may include generating a reference plasma reaction, measuring a variation of intensity by wavelength for plasma light emitted from the reference plasma reaction, and calculating an electron density and an electron temperature from a ratio in intensity of the plasma light.

Abstract: A method of manufacturing a semiconductor device, the method including forming a tunnel insulating layer on an upper surface of a substrate, forming gate patterns on an upper surface of the tunnel insulating layer, forming capping layer patterns on sidewalls of the gate patterns and on the upper surface of the tunnel insulating layer, etching a portion of the tunnel insulating layer that is not covered with the gate patterns or the capping layer patterns to form a tunnel insulating layer pattern, and forming a first insulating layer on the upper surface of the substrate to cover the gate patterns, the capping layer patterns, and the tunnel insulating layer pattern, wherein the first insulating layer has an air gap between the capping layer patterns.

Abstract: A touch controller is provided. The touch controller includes a driving circuit configured to mask some pulses of a first pulse signal having a certain frequency to generate a second pulse signal, and supply the second pulse signal to a touch panel as a driving signal and a sensing circuit configured to receive a sensing signal generated by the touch panel based on the driving signal and generate touch data, based on the sensing signal.

Abstract: A touch sensing device includes a touch screen panel including a touch sensor configured to generate a first electrical change corresponding to a touch and a touch controller configured to detect touch position data with respect to an area on the touch screen panel associated with the touch, based on the first electrical change of the touch sensor.

Abstract: The protective circuit includes a voltage dividing circuit connected in parallel between a first electrode and a second electrode of the unit cell and including a first voltage dividing resistor and a second voltage dividing resistor; a first switching device connected to a junction between the first voltage dividing resistor and the second voltage dividing resistor; a second switching device connected between the junction and the third switching device; and a fourth switching device connected between the junction and the third switching device, wherein, when output voltage of the unit cell becomes equal to or lower than a first reference voltage, the fourth switching device and the first switching device are sequentially turned off, the second switching device is turned on, and the third switching device is turned off, so that voltage output through the first output terminal can be cut off.

Abstract: A touch sensing device includes a touch screen panel including a touch sensor configured to generate a first electrical change corresponding to a touch and a touch controller configured to detect touch position data with respect to an area on the touch screen panel associated with the touch, based on the first electrical change or the touch sensor.

Abstract: The present invention relates to a cathode current collector for a solid oxide fuel cell and, more particularly, to a cathode current collector inserted between a cell and a metal separator constituting a unit of a fuel cell stack, and a solid oxide fuel cell comprising the same.

Abstract: Provided are substrate processing systems and methods of managing the same. The method may include displaying a notification for a preventive maintenance operation on a chamber, performing a maintenance operation on the chamber, performing a first optical test, and evaluating the preventive maintenance operation. The first optical test may include generating a reference plasma reaction, measuring a variation of intensity by wavelength for plasma light emitted from the reference plasma reaction, and calculating an electron density and an electron temperature from a ratio in intensity of the plasma light.

Abstract: A touch screen controller is provided. The touch screen controller includes: an offset cancellation circuit configured to cancel offset capacitance of a touch screen panel including a first channel and a second channel crossing the first channel, the offset cancellation circuit connected to the touch screen panel through a sensing node; a charge amplifier configured to generate a sensing voltage from a sensing signal output from the touch screen panel, the charge amplifier including an amplifier having a first input terminal connected to the sensing node and a second input terminal to which an input voltage is applied; and a channel driver configured to provide a driving voltage, which is equal to or greater than the input voltage, to the second channel in a self capacitance sensing mode for the first channel.

Abstract: In searching for a phone number in a wireless terminal, image search mode is entered when an image search is selected in phone book search mode and the image data stored in a phone book are displayed. When a SEND key is pressed continuously for a predetermined time, a call is sent to a phone number stored in the phone book associated with the selected image data. Whenever the SEND key is pressed for a predetermined time, phone numbers stored in the phone book associated with the selected image data are sequentially displayed. When image rearrangement is selected while image data are displayed, the image data are classified into moving and still images on a group-by-group basis and rearranged. When selected image view is selected while image data are displayed, the image data are enlarged and displayed, and image data stored in a corresponding folder are displayed.

Abstract: A flash memory management method is provided. According to the method, when a request to write the predetermined data to a page to which data has been written is made, the predetermined data is written to a log block corresponding to a data block containing the page. When a request to write the predetermined data to the page again is received, the predetermined data is written to an empty free page in the log block. Even if the same page is requested to be continuously written to, the management method allows this to be processed in one log block, thereby improving the effectiveness in the use of flash memory resources.