Abstract: A microelectromechanical system (MEMS) sensor device comprising at least one microelectromechanical system sensor to characterize intracellular dynamics and behavior of a living biological cell so as to quantitatively measure the mechanical strength thereof. The microelectromechanical system sensor being responsive to mechanical force changes during said cell's contraction, migration, proliferation and differentiation.

Abstract: A microelectromechanical system (MEMS) sensor device comprising at least one microelectromechanical system sensor to characterize intracellular dynamics and behavior of a living biological cell so as to quantitatively measure the mechanical strength thereof. The microelectromechanical system sensor being responsive to mechanical force changes during said cell's contraction, migration, proliferation and differentiation.

Abstract: In the present invention, a nanomechanical resonator array (1), which is suitable being used in an oscillator and production method of said nanomechanical resonator array are developed. Said resonator array (1) comprises at least two resonators (2), which are in the size of nanometers, which are vertically arrayed and which are preferably in the form of nano-wire or nano-tube; at least one coupling membrane (3), which mechanically couples said resonators (2) from their one ends, and at least one clamping element (4), which supports mechanical coupling by clamping said coupling membrane (3). Said resonator array (1) can be actuated and its displacements can be sensed. The present invention develops a predictive model of the frequency response of an oscillator comprising the said resonator array (1) for electrostatic actuation and capacitive readout. An oscillator comprised of multiple resonator arrays (1) with different frequency responses connected to a frequency manipulation circuitry can be used as well.

Abstract: In the present invention, a nanomechanical resonator array (1), which is suitable being used in an oscillator and production method of said nanomechanical resonator array are developed. Said resonator array (1) comprises at least two resonators (2), which are in the size of nanometers, which are vertically arrayed and which are preferably in the form of nano-wire or nano-tube; at least one coupling membrane (3), which mechanically couples said resonators (2) from their one ends, and at least one clamping element (4), which supports mechanical coupling by clamping said coupling membrane (3). Said resonator array (1) can be actuated and its displacements can be sensed. The present invention develops a predictive model of the frequency response of an oscillator comprising the said resonator array (1) for electrostatic actuation and capacitive readout. An oscillator comprised of multiple resonator arrays (1) with different frequency responses connected to a frequency manipulation circuitry can be used as well.

Abstract: This invention describes a method and apparatus for actuation and multiplexed sensing using an array of sensing elements. The invention can be used for label-free detection of biological and chemical agents in a robust, miniaturized package. The invention integrates photonics, CMOS electronics, and Micro/Nano system technologies and allows multi-analyte sensing in the same package. The preferred actuation method is using magnetic thin films and preferred sensing method is optical using interference means.

Abstract: This invention describes a method and apparatus for actuation and multiplexed sensing using an array of sensing elements. The invention can be used for label-free detection of biological and chemical agents in a robust, miniaturized package. The invention integrates photonics, CMOS electronics, and Micro/Nano system technologies and allows multi-analyte sensing in the same package. The preferred actuation method is using magnetic thin films and preferred sensing method is optical using interference means.