Patents by Inventor Burkard Lischke

Burkard Lischke has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus for structuring a subject
    Patent number: 4996441
    Abstract: In modern electron beam writers, the subject to be structured is simultaneously processed with a plurality of probes or electron beams. The apparatus of the present invention, instead of sub-dividing a single electron beam into a plurality of probes, utilizes a beam generator having a plurality of sources of electron beams, which are arranged line-like and are imaged demagnified with the assistance of a telecentric electron optical arrangement onto the subject which is to be processed or structured.
    Type: Grant
    Filed: August 21, 1989
    Date of Patent: February 26, 1991
    Assignee: Siemens Aktiengesellschaft
    Inventor: Burkard Lischke