Patents by Inventor Burkhard Altekruger
Burkhard Altekruger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8691009Abstract: A pulling apparatus and a method with which especially heavy crystals (5) can be pulled using the Czochralski method utilizing the pulling apparatus. For this purpose the neck (4) of the crystal (5) has an enlargement (10) beneath which extends the support device. This device includes latches (7), which are moved from a resting position into an operating position in which the latches (7) extend beneath the enlargement (10). Each latch (7) is supported on the base body such that it is swivellable about a pivot axis (8) and can assume two stable positions, namely the resting position and the operating position. Each of these positions is defined by a stop on the base body. When the latch rests on the one stop, its center of gravity, viewed from the neck (4), is located on the other side of the pivot axis (8). When the latch rests on the other stop, the center of gravity is located on this side of the pivot axis (8).Type: GrantFiled: April 9, 2009Date of Patent: April 8, 2014Assignee: Siltronic AGInventors: Burkhard Altekrüger, Stefan Henkel, Axel Vonhoff, Erich Tomzig, Dieter Knerer
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Patent number: 7828897Abstract: A pulling apparatus and a method with which especially heavy crystals (5) can be pulled using the Czochralski method utilizing the pulling apparatus. For this purpose the neck (4) of the crystal (5) has an enlargement (10) beneath which extends the support device. This device includes latches (7), which are moved from a resting position into an operating position in which the latches (7) extend beneath the enlargement (10). Each latch (7) is supported on the base body such that it is swivellable about a pivot axis (8) and can assume two stable positions, namely the resting position and the operating position. Each of these positions is defined by a stop on the base body. When the latch rests on the one stop, its center of gravity, viewed from the neck (4), is located on the other side of the pivot axis (8). When the latch rests on the other stop, the center of gravity is located on this side of the pivot axis (8).Type: GrantFiled: July 25, 2007Date of Patent: November 9, 2010Assignees: Crystal Growing Systems GmbH, Siltronic AGInventors: Burkhard Altekrüger, Stefan Henkel, Axel Vonhoff, Erich Tomzig, Dieter Knerer
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Publication number: 20090188425Abstract: A pulling apparatus and a method with which especially heavy crystals (5) can be pulled using the Czochralski method utilizing the pulling apparatus. For this purpose the neck (4) of the crystal (5) has an enlargement (10) beneath which extends the support device. This device includes latches (7), which are moved from a resting position into an operating position in which the latches (7) extend beneath the enlargement (10). Each latch (7) is supported on the base body such that it is swivellable about a pivot axis (8) and can assume two stable positions, namely the resting position and the operating position. Each of these positions is defined by a stop on the base body. When the latch rests on the one stop, its center of gravity, viewed from the neck (4), is located on the other side of the pivot axis (8). When the latch rests on the other stop, the center of gravity is located on this side of the pivot axis (8).Type: ApplicationFiled: April 9, 2009Publication date: July 30, 2009Inventors: Burkhard ALTEKRUGER, Stefan Henkel, Axel Vonhoff, Erich Tomzig, Dieter Knerer
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Publication number: 20080022922Abstract: A pulling apparatus and a method with which especially heavy crystals (5) can be pulled using the Czochralski method utilizing the pulling apparatus. For this purpose the neck (4) of the crystal (5) has an enlargement (10) beneath which extends the support device. This device includes latches (7), which are moved from a resting position into an operating position in which the latches (7) extend beneath the enlargement (10). Each latch (7) is supported on the base body such that it is swivellable about a pivot axis (8) and can assume two stable positions, namely the resting position and the operating position. Each of these positions is defined by a stop on the base body. When the latch rests on the one stop, its center of gravity, viewed from the neck (4), is located on the other side of the pivot axis (8). When the latch rests on the other stop, the center of gravity is located on this side of the pivot axis (8).Type: ApplicationFiled: July 25, 2007Publication date: January 31, 2008Inventors: Burkhard Altekruger, Stefan Henkel, Axel Vonhoff, Erich Tomzig, Dieter Knerer
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Patent number: 7261773Abstract: The invention relates to producing a melt that is as homogeneous as possible, to which fresh material in the form of granulate is continuously supplied. Since the granulate is cooler than the melt, heat sinks form that are especially pronounced when the granulate forms clumps in the melt. Therefore, the invention relates to a means for distributing the granulate. In one aspect, the means are inductors arranged outside the melting crucible that generate an alternating magnetic field in the melt. In this way, electrical currents are induced there that, in turn, cause the material flows. In one aspect, the inductors are arranged and controlled in such a way that a rapid distribution of the granulate is effected and thus its rapid melting. In this way, good homogeneity is achieved, especially in the center of the melt where the removal of the melted material also occurs.Type: GrantFiled: August 26, 2004Date of Patent: August 28, 2007Assignee: Crystal Growing Systems GmbHInventors: Andreas Mühe, Burkhard Altekrüger, Axel Vonhoff
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Patent number: 7179331Abstract: The invention presented here relates to a crystal growing equipment. It is equipped in general with a resistance heater for heating a melt (13) as well as with field coils, which generate alternating magnetic field in a crucible, with which flows can be induced in the melt (13). The invention is so designed that the resistance heaters are also devised to function as the field coils, that is, they are built of a hollow cylindrical body (1), in which, by means of a surrounding slit (2) which winds around it, a spiral-shaped single layer current path is formed. This has the advantage that the current needed for the electrical heating in the equipment is also used for the generation of the magnetic field. Thus, neither separate field coils nor a separate current supply is necessary. Further, the resistance heater, which serves as the field coil arranged as a coil array, is high temperature resistant and surrounds the immediate hot core zone of the equipment and thus the region of the melt.Type: GrantFiled: August 19, 2004Date of Patent: February 20, 2007Assignee: Crystal Growing Systems GmbHInventors: Andreas Mühe, Burkhard Altekrüger, Axel Vonhoff
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Publication number: 20050275144Abstract: The invention is based on the problem of producing a melt that is as homogeneous as possible, to which fresh material in the form of granulate is continuously supplied. Since the granulate is cooler than the melt, heat sinks form that are especially pronounced when the granulate forms clumps in the melt. Therefore the invention suggests the provision of means for distributing the granulate. Especially suitable means are inductors (6) arranged outside the melting crucible (3) that generate an alternating magnetic field in the melt. In this way, electrical currents are induced there that in turn cause the material flows. The inductors are arranged and controlled in such a way that a rapid distribution of the granulate is effected and thus its rapid melting. In this way, good homogeneity is achieved, especially in the center of the melt where the removal of the melted material also occurs.Type: ApplicationFiled: August 26, 2004Publication date: December 15, 2005Inventors: Andreas Muhe, Burkhard Altekruger, Axel Vonhoff
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Publication number: 20050087125Abstract: The invention presented here relates to a crystal growing equipment. It is equipped in general with a resistance heater for heating a melt (13) as well as with field coils, which generate alternating magnetic field in a crucible, with which flows can be induced in the melt (13). The invention is so designed that the resistance heaters are also devised to function as the field coils, that is, they are built of a hollow cylindrical body (1), in which, by means of a surrounding slit (2) which winds around it, a spiral-shaped single layer current path is formed. This has the advantage that the current needed for the electrical heating in the equipment is also used for the generation of the magnetic field. Thus, neither separate field coils nor a separate current supply is necessary. Further, the resistance heater, which serves as the field coil arranged as a coil array, is high temperature resistant and surrounds the immediate hot core zone of the equipment and thus the region of the melt.Type: ApplicationFiled: August 19, 2004Publication date: April 28, 2005Inventors: Andreas Muhe, Burkhard Altekruger, Axel Vonhoff
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Patent number: 6341173Abstract: A device and process for the determination of the diameters of a crystal that is pulled from a liquified material. In this connection several video cameras are provided, each of which reproduces its own section along the vertical axis of the crystal or in a direction vertical to it. The image angles of the camera are laid out in such a way that the object to be reproduced completely fills the entire picture plane—at least in one direction. For objects with a small diameter; e.g., the crystal neck, a camera with a small image angle is used, while for objects with a large diameter; e.g., the crystal body, a camera with a large image angle is used.Type: GrantFiled: August 27, 1998Date of Patent: January 22, 2002Assignee: Leybold Systems GmbHInventors: Burkhard Altekrüger, Joachim Aufreiter, Dieter Brüss, Klaus Kalkowski
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Publication number: 20010043733Abstract: A device and process for the determination of the diameters of a crystal that is pulled from a liquified material. In this connection several video cameras are provided, each of which reproduces its own section along the vertical axis of the crystal or in a direction vertical to it. The angles of image of the camera are laid out in such a way that the object to be reproduced completely fills the entire picture plane - - - at least in one direction. For objects with a small diameter; e.g., the crystal neck, a camera with a small angle of image is used, while for objects with a large diameter; e.g., the crystal body, a camera with a large angle of image is used.Type: ApplicationFiled: August 27, 1998Publication date: November 22, 2001Inventors: BURKHARD ALTEKRUGER, JOACHIM AUFREITER, DIETER BRUSS, KLAUS KALKOWSKI
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Patent number: 6277192Abstract: A crystal pulling unit for the production of a crystal block has a recharging tube (7), via which granulate (17) enters into a crucible (2) with a melt (3), located within a container (1). This recharging tube (7) has an annular space (20) between an inner wall (18) and an outer wall (19), which is open on the lower front side of the recharging tube (7) and is connected with the protective gas source (13) to supply protective gas. This protective gas cools the recharging tube (7) and around its outlet, forms a gas mist that prevents the entry of finer fractions of the charging material into the pulling space.Type: GrantFiled: March 22, 1999Date of Patent: August 21, 2001Assignee: Leybold Systems GmbHInventors: Burkhard Altekrüger, Joachim Aufreiter
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Patent number: 6231669Abstract: A crystal pulling unit for the production of a crystal block has a recharging tube (7), via which granulate (17) is introduced into a crucible (2) with a melt (3), located inside a container (1). A fine-dust separator (8) is located in the recharging tube (7) outside the container (1); the separator works like an air classifier and, by means of a protective gas cushion, removes fine dusts from the granulate (17). This counters the danger of clogging of the recharging tube (7) by the caking of the recharging material.Type: GrantFiled: March 22, 1999Date of Patent: May 15, 2001Assignee: Leybold Systems GmbHInventors: Burkhard Altekrüger, Joachim Aufreiter
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Patent number: 6203610Abstract: A device for monitoring a melt for the production of crystals. A camera is provided which images at least portions of the surface of the contents of a crucible. An evaluating device is used to evaluate the camera's images with respect to solid and liquid portions of the surface of the crucible contents.Type: GrantFiled: May 17, 1999Date of Patent: March 20, 2001Assignee: Leybold Systems GmbHInventors: Burkhard Altekrüger, Joachim Aufreiter, Dieter Brüss, Klaus Kalkowski
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Patent number: 6126745Abstract: A device for controlling crystal growth processes which run through various process phases, for instance, melting or cool-down, and in which the shape of the crystal has different areas during growth, for instance, a neck and/or a shoulder. Certain process parameters and target values, as well as input values and output values, for instance, a certain gas pressure or a certain rotational speed, are also associated with each of these areas and phases. The linking of these parameters is accomplished by function generators or tables. With the aid of the control device, it is made possible to generate a specially adapted linking of the respectively necessary input and output parameters for each of the special process phases and crystal sections with an essentially uniform construction and a comprehensible structure.Type: GrantFiled: February 19, 1999Date of Patent: October 3, 2000Assignee: Leybold Systems GmbHInventors: Burkhard Altekruger, Joachim Aufreiter, Dieter Bruss, Klaus Kalkowski
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Patent number: 5853479Abstract: An image of the meniscus ring (21) between the crystal (20) and the melt (4) is formed by optical means (12, 24) on a sensor, the signals of which yield the actual value for the diameter of the crystal. Two optical measuring devices are provided, the optical paths of which are defined by base points on the meniscus ring (21) and two planes which are offset by 90.degree. to each other and which are parallel to the main axis of the crystal and in tangential contact with the meniscus ring (21). The two optical paths are preferably set up to intersect, their intersection being in the viewing window.Type: GrantFiled: December 3, 1996Date of Patent: December 29, 1998Assignee: Balzers und LeyboldInventors: Joachim Aufreiter, Dieter Bruss, Burkhard Altekruger
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Patent number: 5587016Abstract: A source (1) is equipped with a conveying device (4) for discharging the particles (2, 2a) at adjustable rates per unit time. A crystal (16), formed from doped particles, is withdrawn from the melting crucible (13) at a predetermined rate per unit time. So that the control process can be conducted smoothly over prolonged periods of time with precise doping, the particles (2, 2a) are fed single file to the melting crucible (13) and counted by at least one sensor (21, 22). The sequence of count pulses is sent to a counter (25) and compared there with a corresponding sequence of reference input pulses. The comparison signal formed from the count pulses and the reference input pulses is used, in accordance with its sign, as a control signal for adjusting the amount of particles being discharged per unit time from source (1) to correspond to the reference value.Type: GrantFiled: November 13, 1995Date of Patent: December 24, 1996Assignee: Leybold AktiengesellschaftInventors: Burkhard Altekruger, Joachim Aufreiter, Dieter Bruss, Klaus Kalkowski
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Patent number: 5485802Abstract: A crucible is situated in a vacuum chamber and provided with a feeder for granulate material, heating elements for melting the material, and a crystal puller above the crucible. Measuring elements provide signals for a controller including a fuzzy processor utilizing an empirically determined data field to output a signal for the material feeder.Type: GrantFiled: January 18, 1994Date of Patent: January 23, 1996Assignee: Leybold AktiengesellschaftInventors: Burkhard Altekruger, Roland Gesche, Martin Flachsel, Joachim Aufreiter
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Patent number: 5360480Abstract: A prefusing crucible in a closed prefusing tank is provided above a melting crucible in a closed vacuum container. Prefusing the charge material prevents thermal shock to the melt in the crucible from which monocrystals are drawn. A cover provided over the overflow from the prefusing crucible acts as a dust trap.Type: GrantFiled: June 1, 1993Date of Patent: November 1, 1994Assignee: Leybold AGInventor: Burkhard Altekruger