Patents by Inventor Burkhardt Speit

Burkhardt Speit has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for making substrate wafers for low-defect semiconductor components, obtained thereby and uses thereof
    Publication number: 20050193942
    Abstract: A method for making a substrate wafer for a low-defect semiconductor component is described. In this method a single crystal having a [0001] surface perpendicular to a c-axis thereof is formed, subdivided into thin disks each with at least one disk surface to be coated, the at least one disk surface is smoothed and the thin disks are tempered at a temperature above 1770 K. Preferably the tempering occurs for at least 10 minutes at temperatures greater than 1770 K in a dust-poor atmosphere with a reduced oxygen partial pressure. Al2O3 is a preferred material for the single crystal.
    Type: Application
    Filed: March 1, 2005
    Publication date: September 8, 2005
    Inventors: Claudio Gorgoni, Burkhardt Speit, Ingo Koehler, Jaques Guinchard, Peter Blaum, Wolfram Beier