Patents by Inventor by Michiko Matsui, legal representative

by Michiko Matsui, legal representative has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Movement measuring interferometer and driving system
    Patent number: 5164792
    Abstract: A table carrier system of the present invention has a movable table for carrying an object. A displacement detecting system for detecting the displacement of the table by using an interference of light, and a table driving system positions the table according to the detected displacement. If a scaling amount is set in order to change a predetermined displacement range of the table, a reference value of wavelength set in the detecting system is changed in compliance with the scaling amount.
    Type: Grant
    Filed: July 20, 1990
    Date of Patent: November 17, 1992
    Assignee: Asahi Kogaku Kogyo Kabushiki Kaisha
    Inventors: Yuji Matsui, deceased, by Michiko Matsui, legal representative, Jun Nonaka