Patents by Inventor by P. J. C. Lindfors, administrator

by P. J. C. Lindfors, administrator has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for non-contact xyz position sensing
    Patent number: 4724322
    Abstract: A method for detecting and precisely locating features such as susceptor surfaces, wafers and surface depressions and elevations, is disclosed. A modified high angle, infrared, crossed-optics-pair sensor unit is used, as well as both perpendicular and parallel scanning.
    Type: Grant
    Filed: March 3, 1986
    Date of Patent: February 9, 1988
    Assignee: Applied Materials, Inc.
    Inventors: James L. Knowles, Jan E. G. Pantzar, deceased, by P. J. C. Lindfors, administrator