Patents by Inventor Byeong An

Byeong An has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sputtering apparatus and driving method thereof
    Publication number: 20060278522
    Abstract: A sputtering apparatus for depositing a target material on a substrate includes a chamber, a target in the chamber to provide the target material, a carrier to carry the substrate in the chamber to face the target, and a plurality of masks arranged along sides of the carrier and being movable back and forth with respect to the carrier.
    Type: Application
    Filed: June 13, 2006
    Publication date: December 14, 2006
    Inventors: Sung Kim, Tae Lim, Hwan Yoo, Kwang Yoo, Yang Moon, Byeong An