Patents by Inventor Byeong-chu Lee

Byeong-chu Lee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus having heating portion in chemical bath for substrate wet treatment and method of heating chemical for substrate wet treatment using the apparatus
    Publication number: 20070175497
    Abstract: There are provided an apparatus having a heating portion in a chemical bath for substrate wet treatment and a method of heating a chemical for substrate wet treatment using the apparatus. The apparatus includes a chemical bath containing a chemical for substrate wet treatment. A heating portion is installed in the chemical bath, and the heating portion includes a heating element and a housing accommodating the heating element. An inert gas is filled in the housing.
    Type: Application
    Filed: December 13, 2006
    Publication date: August 2, 2007
    Inventors: Byeong-chu Lee, Dong-chul Heo, Mo-hyun Cho