Abstract: The inventive concept provides a method for treating a substrate. In an embodiment, the substrate treating method includes a treatment step of treating a residue on the substrate with a first fluid in a supercritical state and a second fluid in a supercritical state in a process space of a chamber, and the first fluid in the supercritical state and the second fluid in the supercritical state have different densities.

Abstract: Method and apparatus for etching a thin layer including silicon nitride formed on a substrate are disclosed. Etchant including phosphoric acid and water is supplied on the substrate so that a liquid layer is formed on the substrate. The thin layer is etched by reaction between the thin layer and the etchant. Thickness of the liquid layer is measured to detect variation in the thickness of the liquid layer while etching the thin layer. Variation in the concentration of the phosphoric acid and the water is calculated based on the variation in the thickness of the liquid layer. Water is supplied on the substrate based on the variation in the concentration of the phosphoric acid and the water so that the concentration of the phosphoric acid and the water becomes a predetermined value.

Abstract: The present invention provides a method of manufacturing a graphene nanosphere through a single process that is simplified in order to enable mass production. The method includes step 1 of manufacturing a silicon carbide nanosphere coated with graphene through chemical vapor deposition (CVD) using a gas containing a silicon source and a carbon source and step 2 of discontinuing the chemical vapor deposition (CVD) and then performing cooling.

Abstract: Method and apparatus for etching a thin layer including silicon nitride formed on a substrate are disclosed. Etchant including phosphoric acid and water is supplied on the substrate so that a liquid layer is formed on the substrate. The thin layer is etched by reaction between the thin layer and the etchant. Thickness of the liquid layer is measured to detect variation in the thickness of the liquid layer while etching the thin layer. Variation in the concentration of the phosphoric acid and the water is calculated based on the variation in the thickness of the liquid layer. Water is supplied on the substrate based on the variation in the concentration of the phosphoric acid and the water so that the concentration of the phosphoric acid and the water becomes a predetermined value.

Abstract: According to an exemplary embodiment of the present invention, a substrate treatment apparatus includes a chamber member including a treatment space in which a substrate is to be treated, a substrate support unit installed in the treatment space and supporting a substrate, a chemical ejection unit connected to the chamber member and ejecting a chemical fluid to the substrate support unit, and a steam supply unit connected to the chamber member and supplying steam to the chamber member.

Abstract: The inventive concept provides a method for treating a substrate. In an embodiment, the substrate treating method includes a treatment step of treating a residue on the substrate with a first fluid in a supercritical state and a second fluid in a supercritical state in a process space of a chamber, and the first fluid in the supercritical state and the second fluid in the supercritical state have different densities.

Abstract: The present invention provides a method of manufacturing a graphene nanosphere through a single process that is simplified in order to enable mass production. The method includes step 1 of manufacturing a silicon carbide nanosphere coated with graphene through chemical vapor deposition (CVD) using a gas containing a silicon source and a carbon source and step 2 of discontinuing the chemical vapor deposition (CVD) and then performing cooling.

Abstract: Disclosed is a device for notching, at an interval of a unit electrode, a continuous electrode sheet in which an electrode active material is applied to one or both surfaces thereof, to form a plurality of unit electrodes from the electrode sheet, the device including a press to press notches on the top and the bottom of the electrode sheet at a set position, and two or more grippers arranged at the rear of the press based on a feed direction of the electrode sheet, the grippers drawing and transporting the electrode sheet by one pitch, a size corresponding to the unit electrode according to operation of the press, wherein while one of the grippers draws and transports the electrode sheet, the remaining grippers move to a position for drawing.

Abstract: Disclosed herein is a folding device to manufacture a stacked/folded type electrode assembly having unit cells sequentially stacked in a state in which a separation film is disposed between the respective unit cells, the folding device including a web supply unit to supply a web having plate-shaped unit cells arranged at a top of a separation film at predetermined intervals, a winding jig to rotate the unit cells while holding a first one of the unit cells of the web so that the unit cells are sequentially stacked in a state in which the separation film is disposed between the respective unit cells, and a rotary shaft compensation unit to compensate for the position of a rotary shaft of the winding jig in an advancing direction of the web (X-axis direction).

Abstract: Disclosed herein is a folding device to manufacture a stacked/folded type electrode assembly having unit cells sequentially stacked in a state in which a separation film is disposed between the respective unit cells, the folding device including a web supply unit to supply a web having plate-shaped unit cells arranged at the top of a separation film at predetermined intervals, a winding jig to rotate the unit cells while holding a first one of the unit cells of the web so that the unit cells are sequentially stacked in a state in which the separation film is disposed between the respective unit cells, and a Y-axis directional rotary shaft compensation unit to compensate for a position of a rotary shaft of the winding jig in a direction (Y-axis direction) perpendicular to an advancing direction of the web, wherein the Y-axis directional rotary shaft compensation unit periodically changes the position of the rotary shaft in the direction (Y axis) perpendicular to the advancing direction (X axis) of the web to m

Abstract: Disclosed is a method for manufacturing a battery cell including an electrode assembly and electrolyte provided in a battery case made of a laminate sheet having a resin layer and a metal layer, which includes: (a) mounting the electrode assembly in the battery case and sealing the periphery of the battery case except for one end part thereof through thermal fusion; (b) introducing the electrolyte through the unsealed end part and sealing the end via thermal fusion; (c) charging-discharging the battery cell to activate the same; (d) transferring gas generated during activation and excess electrolyte to the foregoing end part of the battery cell by centrifugal force; and (e) removing the gas and excess electrolyte from the end part.

Abstract: Disclosed is a device for notching, at an interval of a unit electrode, a continuous electrode sheet in which an electrode active material is applied to one or both surfaces thereof, to form a plurality of unit electrodes from the electrode sheet, the device including a press to press notches on the top and the bottom of the electrode sheet at a set position, and a drawing member arranged at the rear of the press based on a feed direction of the electrode sheet, the drawing member drawing and transporting the electrode sheet by one pitch, a size corresponding to the unit electrode according to operation of the press, wherein, when one of the grippers draws and transports the electrode sheet, the remaining grippers move to a position for drawing.

Abstract: Disclosed is a device for cutting an electrode sheet laminate wherein two or more continuous electrode sheets, in which an electrode active material is applied to one or both surfaces thereof, are laminated, to form a plurality of unit electrode laminates from the electrode sheet laminate, the device including a cutter to cut the electrode sheet laminate at a set position and thereby form unit electrode laminates, and two or more transport grippers arranged at the front of the cutter based on a feed direction of the electrode sheet laminate, the transport grippers drawing and transporting the electrode sheet laminate by one pitch, a size corresponding to the unit electrode laminate according to operation of the cutter, wherein while one of the transport grippers draws and transports the electrode sheet laminate, the remaining transport grippers move to a position for drawing.

Abstract: Disclosed herein is a battery cell manufacturing device configured to manufacture a battery cell including two or more unit cells. The battery cell manufacturing device includes a unit cell stacking unit into which unit cells are introduced from above and in which the unit cells are sequentially stacked, a wrapping unit to wrap an outside of the unit cell stack discharged from the unit cell stacking unit with a separation film, and a heating unit to thermally shrink the separation film wrapping the outside of the unit cell stack.

Abstract: Disclosed is a method for manufacturing a battery cell including an electrode assembly and electrolyte provided in a battery case composed of a laminate sheet having a resin layer and a metal layer, which includes; (a) thermally fusing and sealing the periphery of the case except for an end part thereof while the electrode assembly is mounted in the case; (b) introducing the electrolyte through the unsealed end part then sealing the same by thermal fusion; (c) charging and discharging the battery cell to activate the same; (d) puncturing the unsealed part inside the end part to form a through-hole communicating with the inside of the case; and (e) pulling top and bottom faces of the battery case in the opposite direction to each other at the unsealed part to open the same while applying vacuum pressure, to thereby remove the gas generated during activation as well as excess electrolyte.

Abstract: Disclosed is a unit cell transfer apparatus for arranging and delivering unit cells to a folding device, which is used in a continuous process for manufacturing a stack/folding type electrode assembly having a structure of planar unit cells wound up over a separate film.

Abstract: Disclosed is a device for laminating an electrode assembly including a cathode, an anode and a separator interposed therebetween laminated in this order by thermal bonding, the device including an inlet, through which a web having the cathode/separator/anode laminate structure is fed, a heater to heat the web and thereby induce thermal bonding between the cathode, the separator and the anode, an outlet through which the thermally bonded web is discharged, and a transporter to transport the web through the inlet, the heater and the outlet, wherein the transporter imparts a transport driving force to the web in a state that the transporter contacts at least one of the top and the bottom of the web and the heater directly heats a region of the transporter contacting the web and thereby transfers thermal bonding energy to the web.

Abstract: Disclosed herein is a folding device to manufacture a stacked/folded type electrode assembly having unit cells sequentially stacked in a state in which a separation film is disposed between the respective unit cells, the folding device including a web supply unit to supply a web having plate-shaped unit cells arranged at the top of a separation film at predetermined intervals, a winding jig to rotate the unit cells while holding a first one of the unit cells of the web so that the unit cells are sequentially stacked in a state in which the separation film is disposed between the respective unit cells, and a Y-axis directional rotary shaft compensation unit to compensate for a position of a rotary shaft of the winding jig in a direction (Y-axis direction) perpendicular to an advancing direction of the web, wherein the Y-axis directional rotary shaft compensation unit periodically changes the position of the rotary shaft in the direction (Y axis) perpendicular to the advancing direction (X axis) of the web to m

Abstract: Disclosed is a device for notching, at an interval of a unit electrode, a continuous electrode sheet in which an electrode active material is applied to one or both surfaces thereof, to form a plurality of unit electrodes from the electrode sheet, the device including a press to press notches on the top and the bottom of the electrode sheet at a set position, and a drawing member arranged at the rear of the press based on a feed direction of the electrode sheet, the drawing member drawing and transporting the electrode sheet by one pitch, a size corresponding to the unit electrode according to operation of the press, wherein, when one of the grippers draws and transports the electrode sheet, the remaining grippers move to a position for drawing.

Abstract: Disclosed is a device for notching, at an interval of a unit electrode, a continuous electrode sheet in which an electrode active material is applied to one or both surfaces thereof, to form a plurality of unit electrodes from the electrode sheet, the device including a press to press notches on the top and the bottom of the electrode sheet at a set position, and two or more grippers arranged at the rear of the press based on a feed direction of the electrode sheet, the grippers drawing and transporting the electrode sheet by one pitch, a size corresponding to the unit electrode according to operation of the press, wherein while one of the grippers draws and transports the electrode sheet, the remaining grippers move to a position for drawing.