Abstract: A substrate processing apparatus includes a chamber, an upper showerhead, a lower showerhead, a liner, a substrate support ring, and a first driving unit. The chamber provides a processing space for a substrate, the upper showerhead is provided in an upper region of an interior of the chamber, and the lower showerhead is provided in a lower region of the interior of the chamber. The liner is provided in the interior of the chamber, and allows the substrate to be seated thereon. The substrate support ring allows the substrate to be seated thereon, and moves between the lower showerhead and the liner. The first driving unit raises, lowers, and rotates the lower showerhead, and tilts the lower showerhead with respect to the substrate.

Abstract: A substrate processing apparatus includes a chamber, an upper showerhead, a substrate supporter, a lower showerhead assembly, a driving unit, an elevation unit, and a tilting unit. The chamber provides a processing space for a substrate, and the upper showerhead is provided in an upper region of an interior of the chamber. The substrate supporter is provided in the interior of the chamber to support the substrate, and the lower showerhead assembly is provided in an interior of the substrate supporter to supply process gas to the substrate. The driving unit adjusts a gap between the substrate and the lower showerhead assembly, and tilts the lower showerhead assembly with respect to the substrate. The elevation unit adjusts a gap between the substrate and the upper showerhead. The tilting unit tilts the substrate with respect to the upper showerhead.

Abstract: A substrate processing apparatus includes a chamber, an upper showerhead, a substrate supporter, a lower showerhead assembly, first and second elevation units, and first and second tilting units. The chamber provides a processing space for a substrate, and the upper showerhead is provided in an upper region of an interior of the chamber. The substrate supporter is provided in the interior of the chamber to support the substrate, and the lower showerhead assembly is provided in an interior of the substrate supporter to supply process gas to the substrate. The first elevation unit adjusts a gap between the substrate and the lower showerhead assembly, and the first tilting unit tilts the lower showerhead assembly with respect to the substrate. The second elevation unit adjusts a gap between the substrate and the upper showerhead, and the second tilting unit tilts the substrate with respect to the upper showerhead.

Abstract: A walking robot pose estimation method is provided. The walking robot pose estimation method according to an embodiment of the present disclosure includes the calculation a kinematic factor considering data measured by an inertial measurement unit (IMU) mounted on the walking robot and joint kinematics while the walking robot is in motion, obtaining point cloud data with respect to the environment where the walking robot is located by using the LiDAR sensor mounted on it, obtaining image data with respect to the environment where the walking robot is located by using the image sensor mounted on it, data fusion operation of the kinematic factor, the point cloud data, and the image data, and pose estimation of the walking robot based on the fused data.

Abstract: The present application can provide a pressure-sensitive adhesive suitable for a flexible device, and a device comprising the same. In one example, the present application can provide a pressure-sensitive adhesive that is applied to a flexible device to effectively respond to repeated deformation and recovery, does not cause defects before and after deformation, and has excellent recoverability as well.

Abstract: A lighting apparatus for a vehicle includes a base plate having a plurality of mounting portions and a plurality of lighting modules detachably mounted to the plurality of mounting portions. The plurality of lighting modules is configured to radiate light and to define a design of the lighting apparatus depending on locations at which the lighting modules are mounted.

Abstract: The present invention relates to a tire including a sealant layer and a sound-absorbing material layer, and the tire includes a sound-absorbing material layer located on the inner surface of the tire, and a sealant layer disposed between the inner surface of the tire and the sound-absorbing material layer, and applied on the inner surface of the tire, wherein the sound-absorbing material layer includes a first porous material having closed cells, and a second porous material having open cells, so that the tire may self-seal in the event of a puncture by including the sealant layer applied on the inner surface of the tire, may have noise reduction performance by including the sound-absorbing material, and even if a nail penetrates the tire and sealant and reaches the sound-absorbing material, may prevent fine fragments of the sound-absorbing material from degrading the function of the sealant and maintain the noise reduction performance.

Abstract: A camera device including: an image capturing device configured to capture an image to generate an image signal; a housing in which the image capturing device is provided; a light transmitting cover coupled to the housing and configured to transmit light therethrough; a photometric sensor configured to sense an illuminance of light; an ultraviolet lamp provided on one side of the light transmitting cover and configured to irradiate an ultraviolet ray; and a controller configured to control the ultraviolet lamp according to an illuminance sensed by the photometric sensor, where the light transmitting cover is configured to exhibit a photochromic effect based on the ultraviolet ray irradiated by the ultraviolet lamp.

Abstract: The present invention relates to a GB1 domain fusion structure for upregulating recombinant protein expression in plants and, more specifically, to a GB1 domain fusion structure in which the GB1 domain of Streptococcus-derived protein G is fused with a target protein to be expressed in an upregulated manner, and a method for upregulating expression of a recombinant protein by using same. The present invention can bring about a reduced risk of contamination by pathogens and a high production yield, compared to the case of employing animal cells or microbes conventionally established to produce recombinant proteins, and a remarkable improvement in recombinant protein output, compared to the conventional case of employing plants. Thus, the present invention has several advantages in terms of quality and economy and thus can be a very competitive production method in the commercial production of recombinant proteins.

Abstract: A display driving device according to the present disclosure capable of changing image data at a different time for each color when the image data is changed includes: a first array composed of sampling latches configured to latch n-bit image data for each channel; a second array composed of holding latches configured to latch the image data latched in the sampling latches at a latch timing determined for each latch group; a signal generation circuit configured to generate a latch enable signal which causes the holding latches to perform a latch operation at the latch timing determined for each latch group; and a third array including level shifters configured to shift a voltage level of the image data output from the holding latches.

Abstract: A camera apparatus includes a housing, a lens included in the housing, a plurality of light sources arranged around the lens, an illuminance sensor, a first cover covering an end of the lens, a first window mounted on the first cover corresponding to the lens, and a second window mounted on the first cover corresponding to the illuminance sensor.

Abstract: A lighting apparatus for a vehicle includes a base plate having a plurality of mounting portions and a plurality of lighting modules detachably mounted to the plurality of mounting portions. The plurality of lighting modules is configured to radiate light and to define a design of the lighting apparatus depending on locations at which the lighting modules are mounted.

Abstract: Proposed is a multifunctional corrosion probe system that can sense both general corrosion and focusing corrosion of a pipe on the basis of physical changes of stacked specimens. The multifunctional corrosion probe system includes a sensing unit having a plurality of specimens and a plurality of insulating layers, which are alternately stacked, and configured to be inserted into a pipe, anode wires having first ends installed on first sides of the plurality of specimens, respectively, cathode wires having second ends installed on second sides of the plurality of specimens, respectively, a power control unit to which second ends of the plurality of anode wires and second ends of the plurality of cathode wires are connected, and a graph output unit connected with the power control unit, estimating a current that is output from the power control unit, and outputting a resistance graph and a current graph.

Abstract: A semiconductor fabricating apparatus may include a collet structure configured to pick-up a semiconductor chip. The collet structure may include a holder, a plate, an absorption member and an edge contact. The holder may be configured to downwardly receive vacuum. The holder may include a magnet arranged in the holder. The plate may include an upper surface magnetically and mechanically combined with the holder. The plate may include a sidewall wholly exposed by the holder. The plate may receive the vacuum from the holder. The absorption member may make contact with the plate to pick-up the semiconductor chip using the vacuum received from the plate. The edge contact may include a protrusion having a first length protruded from an edge portion of a bottom surface of the holder to make contact with the plate.