Abstract: The present disclosure discloses a substrate heat-treating apparatus including a process chamber in which a flat substrate to be heat treated is placed, the process chamber comprising a beam transmitting plate placed below the flat substrate and an infrared transmitting plate placed above the flat substrate; a beam irradiating module for irradiating a VCSEL beam having a single wavelength to a lower surface of the flat substrate through the beam transmitting plate; and an temperature measuring module configured to measure the laser beam reflected from the lower surface or an upper surface the flat substrate, thereby measuring the temperature of the flat substrate.

Abstract: The present disclosure discloses a substrate heat-treating apparatus including a process chamber in which a flat substrate to be heat treated is placed, the process chamber comprising a beam transmitting plate placed below the flat substrate and an infrared transmitting plate placed above the flat substrate; a beam irradiating module for irradiating a VCSEL beam having a single wavelength to a lower surface of the flat substrate through the beam transmitting plate; and an emissivity measuring configured to measure the laser beam reflected from the lower surface or an upper surface the flat substrate, thereby measuring the emissivity of the flat substrate.

Abstract: A device is provide including: a storage device comprising a memory configured to store configuration data used for test booting for a process of testing the device, before the test booting; and a controller configured to perform the test booting using the stored configuration data when receiving a start signal of the test booting, to control the process of testing the device to be performed after the test booting, and to delete the configuration data stored in the storage device when a completion signal of the process of testing the device is received.

Abstract: A device is provide including: a storage device comprising a memory configured to store configuration data used for test booting for a process of testing the device, before the test booting; and a controller configured to perform the test booting using the stored configuration data when receiving a start signal of the test booting, to control the process of testing the device to be performed after the test booting, and to delete the configuration data stored in the storage device when a completion signal of the process of testing the device is received.