Abstract: A vertical comb-type electrode structure capable of a large linear-displacement motion. The vertical comb-electrode structure includes: a first substrate including a plurality of vertical static comb-electrodes; and a second substrate stacked on an upper surface of the first substrate, the second substrate including a plurality of vertical moving comb-electrodes, wherein the static comb-electrodes are vertically moved or positioned a predetermined distance toward the moving comb-electrodes in the initial state of the electrode structure so that no gaps between the static comb-electrodes and the moving comb-electrodes exist.

Abstract: Apparatus and a method for driving and detecting a motion of MEMS structure using single electrode. Apparatus includes a driving signal generation part driving MEMS structure; a motion detection part detecting motion of MEMS structure and outputting a motion current signal; an amplification part amplifying motion current signal and outputting a motion voltage signal; a gain adjustment part amplifying driving signal and outputting an amplified driving signal; a differential circuit part adding and subtracting with respect to signals output from the amplifying part and the gain adjustment part and outputting a motion signal without the driving signal; and a motion signal detection part selecting and outputting a motion signal of a predetermined frequency from the motion signal output from the differential circuit part. The variable capacitor is configured by a movable electrode plate integrally formed with MEMS structure and a fixed electrode plate disposed opposite to the movable electrode plate.