Patents by Inventor Byong Hyop Oh
Byong Hyop Oh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11930721Abstract: Various techniques and apparatus permit fabrication of superconductive circuits. A niobium/aluminum oxide/niobium trilayer may be formed and individual Josephson Junctions (JJs) formed. A protective cap may protect a JJ during fabrication. A hybrid dielectric may be formed. A superconductive integrated circuit may be formed using a subtractive patterning and/or additive patterning. A superconducting metal layer may be deposited by electroplating and/or polished by chemical-mechanical planarization. The thickness of an inner layer dielectric may be controlled by a deposition process. A substrate may include a base of silicon and top layer including aluminum oxide. Depositing of superconducting metal layer may be stopped or paused to allow cooling before completion. Multiple layers may be aligned by patterning an alignment marker in a superconducting metal layer.Type: GrantFiled: May 8, 2020Date of Patent: March 12, 2024Assignee: 1372934 B.C. LTD.Inventors: Eric Ladizinsky, Jeremy P. Hilton, Byong Hyop Oh, Paul I. Bunyk
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Patent number: 11856871Abstract: Systems and methods for fabricating a superconducting integrated circuit that includes wiring layers comprising low-noise material are described. A superconducting integrated circuit can be implemented in a computing system that includes a quantum processor. Such a superconducting integrated circuit includes a first set of one or more wiring layers that form a noise-susceptible superconducting device that can decrease processor when exposed to noise. The superconducting integrated circuit can further include a second set of one or more wiring layers that form a superconducting device that is less susceptible to noise. Fabricating a superconducting device that contains low-noise material can include depositing and patterning a wiring layer comprising a first material that is superconductive in a respective range of temperatures and depositing and patterning a different wiring layer comprising a second material that is superconductive in a respective range of temperatures.Type: GrantFiled: February 25, 2022Date of Patent: December 26, 2023Assignee: D-WAVE SYSTEMS INC.Inventors: Trevor M. Lanting, Danica W. Marsden, Byong Hyop Oh, Eric G. Ladizinsky, Shuiyuan Huang, J. Jason Yao, Douglas P. Stadtler
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Publication number: 20230240154Abstract: Methods of forming superconducting integrated circuits are discussed. The method includes depositing a first superconducting metal layer to overlie at least a portion of a substrate, depositing a dielectric layer to cover a first region of the first superconducting metal layer, pattering the dielectric layer to expose at least a portion of the first region of the first superconducting metal layer and form an opening, and depositing a second superconducting metal layer at an ambient temperature that is less than a melting temperature of the second superconducting metal layer such that the second superconducting metal layer fills the opening and conductively contacts the at least a portion of the first region of the first superconducting metal layer.Type: ApplicationFiled: June 22, 2021Publication date: July 27, 2023Inventors: Byong Hyop Oh, Eric G. Ladizinsky, J. Jason Yao
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Publication number: 20220263007Abstract: Systems and methods for fabricating a superconducting integrated circuit that includes wiring layers comprising low-noise material are described. A superconducting integrated circuit can be implemented in a computing system that includes a quantum processor. Such a superconducting integrated circuit includes a first set of one or more wiring layers that form a noise-susceptible superconducting device that can decrease processor when exposed to noise. The superconducting integrated circuit can further include a second set of one or more wiring layers that form a superconducting device that is less susceptible to noise. Fabricating a superconducting device that contains low-noise material can include depositing and patterning a wiring layer comprising a first material that is superconductive in a respective range of temperatures and depositing and patterning a different wiring layer comprising a second material that is superconductive in a respective range of temperatures.Type: ApplicationFiled: February 25, 2022Publication date: August 18, 2022Inventors: Trevor M. Lanting, Danica W. Marsden, Byong Hyop Oh, Eric G. Ladizinsky, Shuiyuan Huang, J. Jason Yao, Douglas P. Stadtler
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Patent number: 10991755Abstract: Various techniques and apparatus permit fabrication of superconductive circuits and structures, for instance Josephson junctions, which may, for example be useful in quantum computers. For instance, a low magnetic flux noise trilayer structure may be fabricated having a dielectric structure or layer interposed between two elements or layers capable of superconducting. A superconducting via may directly overlie a Josephson junction. A structure, for instance a Josephson junction, may be carried on a planarized dielectric layer. A fin may be employed to remove heat from the structure. A via capable of superconducting may have a width that is less than about 1 micrometer. The structure may be coupled to a resistor, for example by vias and/or a strap connector.Type: GrantFiled: September 12, 2019Date of Patent: April 27, 2021Assignee: D-WAVE SYSTEMS INC.Inventors: Eric Ladizinsky, Geordie Rose, Jeremy P. Hilton, Eugene Dantsker, Byong Hyop Oh
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Publication number: 20200274050Abstract: Various techniques and apparatus permit fabrication of superconductive circuits. A niobium/aluminum oxide/niobium trilayer may be formed and individual Josephson Junctions (JJs) formed. A protective cap may protect a JJ during fabrication. A hybrid dielectric may be formed. A superconductive integrated circuit may be formed using a subtractive patterning and/or additive patterning. A superconducting metal layer may be deposited by electroplating and/or polished by chemical-mechanical planarization. The thickness of an inner layer dielectric may be controlled by a deposition process. A substrate may include a base of silicon and top layer including aluminum oxide. Depositing of superconducting metal layer may be stopped or paused to allow cooling before completion. Multiple layers may be aligned by patterning an alignment marker in a superconducting metal layer.Type: ApplicationFiled: May 8, 2020Publication date: August 27, 2020Inventors: Eric Ladizinsky, Jeremy P. Hilton, Byong Hyop Oh, Paul I. Bunyk
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Patent number: 10700256Abstract: Various techniques and apparatus permit fabrication of superconductive circuits. A niobium/aluminum oxide/niobium trilayer may be formed and individual Josephson Junctions (JJs) formed. A protective cap may protect a JJ during fabrication. A hybrid dielectric may be formed. A superconductive integrated circuit may be formed using a subtractive patterning and/or additive patterning. A superconducting metal layer may be deposited by electroplating and/or polished by chemical-mechanical planarization. The thickness of an inner layer dielectric may be controlled by a deposition process. A substrate may include a base of silicon and top layer including aluminum oxide. Depositing of superconducting metal layer may be stopped or paused to allow cooling before completion. Multiple layers may be aligned by patterning an alignment marker in a superconducting metal layer.Type: GrantFiled: August 17, 2017Date of Patent: June 30, 2020Assignee: D-WAVE SYSTEMS INC.Inventors: Eric Ladizinsky, Jeremy P. Hilton, Byong Hyop Oh, Paul I. Bunyk
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Publication number: 20200152851Abstract: Systems and methods for fabricating a superconducting integrated circuit that includes wiring layers comprising low-noise material are described. A superconducting integrated circuit can be implemented in a computing system that includes a quantum processor. Such a superconducting integrated circuit includes a first set of one or more wiring layers that form a noise-susceptible superconducting device that can decrease processor when exposed to noise. The superconducting integrated circuit can further include a second set of one or more wiring layers that form a superconducting device that is less susceptible to noise. Fabricating a superconducting device that contains low-noise material can include depositing and patterning a wiring layer comprising a first material that is superconductive in a respective range of temperatures and depositing and patterning a different wiring layer comprising a second material that is superconductive in a respective range of temperatures.Type: ApplicationFiled: November 12, 2019Publication date: May 14, 2020Inventors: Trevor M. Lanting, Danica W. Marsden, Byong Hyop Oh, Eric G. Ladizinsky, Shuiyuan Huang, J. Jason Yao, Douglas P. Stadtler
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Publication number: 20200006421Abstract: Various techniques and apparatus permit fabrication of superconductive circuits and structures, for instance Josephson junctions, which may, for example be useful in quantum computers. For instance, a low magnetic flux noise trilayer structure may be fabricated having a dielectric structure or layer interposed between two elements or layers capable of superconducting. A superconducting via may directly overlie a Josephson junction. A structure, for instance a Josephson junction, may be carried on a planarized dielectric layer. A fin may be employed to remove heat from the structure. A via capable of superconducting may have a width that is less than about 1 micrometer. The structure may be coupled to a resistor, for example by vias and/or a strap connector.Type: ApplicationFiled: September 12, 2019Publication date: January 2, 2020Inventors: Eric Ladizinsky, Geordie Rose, Jeremy P. Hilton, Eugene Dantsker, Byong Hyop Oh
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Patent number: 10453894Abstract: Various techniques and apparatus permit fabrication of superconductive circuits and structures, for instance Josephson junctions, which may, for example be useful in quantum computers. For instance, a low magnetic flux noise trilayer structure may be fabricated having a dielectric structure or layer interposed between two elements or layers capable of superconducting. A superconducting via may directly overlie a Josephson junction. A structure, for instance a Josephson junction, may be carried on a planarized dielectric layer. A fin may be employed to remove heat from the structure. A via capable of superconducting may have a width that is less than about 1 micrometer. The structure may be coupled to a resistor, for example by vias and/or a strap connector.Type: GrantFiled: April 18, 2018Date of Patent: October 22, 2019Assignee: D-WAVE SYSTEMS INC.Inventors: Eric Ladizinsky, Geordie Rose, Jeremy P. Hilton, Eugene Dantsker, Byong Hyop Oh
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Patent number: 10454015Abstract: Fabricating wiring layers above a Josephson junction multi-layer may include removing a part of the multilayer; depositing an insulating layer to overlie a part of the multilayer; and patterning the insulating layer to define a hole in the insulating layer. The method includes depositing a first superconducting wiring layer over a part of the insulating layer and within a portion of the hole. Further, insulating and wiring layers may be deposited and a topmost wiring layer defined. The method includes depositing a passivating layer to overlie the topmost wiring layer. Fabricating a superconducting integrated circuit comprising a hybrid dielectric system may include depositing a high-quality dielectric layer that overlies a superconducting feature. The method includes depositing a second dielectric layer that overlies at least part of the high-quality dielectric layer. The second dielectric layer can comprise a conventional dielectric material.Type: GrantFiled: August 12, 2015Date of Patent: October 22, 2019Assignee: D-WAVE SYSTEMS INC.Inventors: Trevor Michael Lanting, Eric G. Ladizinsky, J. Jason Yao, Byong Hyop Oh
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Publication number: 20180308896Abstract: Various techniques and apparatus permit fabrication of superconductive circuits and structures, for instance Josephson junctions, which may, for example be useful in quantum computers. For instance, a low magnetic flux noise trilayer structure may be fabricated having a dielectric structure or layer interposed between two elements or layers capable of superconducting. A superconducting via may directly overlie a Josephson junction. A structure, for instance a Josephson junction, may be carried on a planarized dielectric layer. A fin may be employed to remove heat from the structure. A via capable of superconducting may have a width that is less than about 1 micrometer. The structure may be coupled to a resistor, for example by vias and/or a strap connector.Type: ApplicationFiled: April 18, 2018Publication date: October 25, 2018Inventors: Eric Ladizinsky, Geordie Rose, Jeremy P. Hilton, Eugene Dantsker, Byong Hyop Oh
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Publication number: 20180219150Abstract: Fabricating wiring layers above a Josephson junction multi-layer may include removing a part of the multilayer; depositing an insulating layer to overlie a part of the multilayer; and patterning the insulating layer to define a hole in the insulating layer. The method includes depositing a first superconducting wiring layer over a part of the insulating layer and within a portion of the hole. Further, insulating and wiring layers may be deposited and a topmost wiring layer defined. The method includes depositing a passivating layer to overlie the topmost wiring layer. Fabricating a superconducting integrated circuit comprising a hybrid dielectric system may include depositing a high-quality dielectric layer that overlies a superconducting feature. The method includes depositing a second dielectric layer that overlies at least part of the high-quality dielectric layer. The second dielectric layer can comprise a conventional dielectric material.Type: ApplicationFiled: August 12, 2015Publication date: August 2, 2018Inventors: Trevor Michael Lanting, Eric G. Ladizinsky, J. Jason Yao, Byong Hyop Oh
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Patent number: 9978809Abstract: Various techniques and apparatus permit fabrication of superconductive circuits and structures, for instance Josephson junctions, which may, for example be useful in quantum computers. For instance, a low magnetic flux noise trilayer structure may be fabricated having a dielectric structure or layer interposed between two elements or layers capable of superconducting. A superconducting via may directly overlie a Josephson junction. A structure, for instance a Josephson junction, may be carried on a planarized dielectric layer. A fin may be employed to remove heat from the structure. A via capable of superconducting may have a width that is less than about 1 micrometer. The structure may be coupled to a resistor, for example by vias and/or a strap connector.Type: GrantFiled: October 10, 2016Date of Patent: May 22, 2018Assignee: D-Wave Systems Inc.Inventors: Eric Ladizinsky, Geordie Rose, Jeremy P. Hilton, Eugene Dantsker, Byong Hyop Oh
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Publication number: 20180033944Abstract: Various techniques and apparatus permit fabrication of superconductive circuits. A niobium/aluminum oxide/niobium trilayer may be formed and individual Josephson Junctions (JJs) formed. A protective cap may protect a JJ during fabrication. A hybrid dielectric may be formed. A superconductive integrated circuit may be formed using a subtractive patterning and/or additive patterning. A superconducting metal layer may be deposited by electroplating and/or polished by chemical-mechanical planarization. The thickness of an inner layer dielectric may be controlled by a deposition process. A substrate may include a base of silicon and top layer including aluminum oxide. Depositing of superconducting metal layer may be stopped or paused to allow cooling before completion. Multiple layers may be aligned by patterning an alignment marker in a superconducting metal layer.Type: ApplicationFiled: August 17, 2017Publication date: February 1, 2018Inventors: Eric Ladizinsky, Jeremy P. Hilton, Byong Hyop Oh, Paul I. Bunyk
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Patent number: 9768371Abstract: Various techniques and apparatus permit fabrication of superconductive circuits. A niobium/aluminum oxide/niobium trilayer may be formed and individual Josephson Junctions (JJs) formed. A protective cap may protect a JJ during fabrication. A hybrid dielectric may be formed. A superconductive integrated circuit may be formed using a subtractive patterning and/or additive patterning. A superconducting metal layer may be deposited by electroplating and/or polished by chemical-mechanical planarization. The thickness of an inner layer dielectric may be controlled by a deposition process. A substrate may include a base of silicon and top layer including aluminum oxide. Depositing of superconducting metal layer may be stopped or paused to allow cooling before completion. Multiple layers may be aligned by patterning an alignment marker in a superconducting metal layer.Type: GrantFiled: March 7, 2013Date of Patent: September 19, 2017Assignee: D-Wave Systems Inc.Inventors: Eric Ladizinsky, Jeremy P. Hilton, Byong Hyop Oh, Paul I. Bunyk
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Patent number: 9634224Abstract: In one aspect, fabricating a superconductive integrated circuit with a Josephson junction includes applying oxygen or nitrogen to at least part of a structure formed from an outer superconductive layer to passivate an artifact, if any, left from removing the portion of the outer superconductive layer. In another aspect, a first superconductive layer is deposited, a second superconductive layer is deposited on the first superconductive layer, an oxide layer is formed on the first superconductive layer, a dielectric layer is deposited on the oxide layer, a portion of the dielectric layer is removed, a first portion of the oxide layer is removed, a second oxide portion is formed in place of the first portion of the oxide layer, and a third superconductive layer is deposited on the dielectric layer and the second oxide portion.Type: GrantFiled: January 20, 2015Date of Patent: April 25, 2017Assignee: D-Wave Systems Inc.Inventors: Eric Ladizinsky, Nicolas Ladizinsky, Jason Yao, Byong Hyop Oh, Richard David Neufeld
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Publication number: 20170098682Abstract: Various techniques and apparatus permit fabrication of superconductive circuits and structures, for instance Josephson junctions, which may, for example be useful in quantum computers. For instance, a low magnetic flux noise trilayer structure may be fabricated having a dielectric structure or layer interposed between two elements or layers capable of superconducting. A superconducting via may directly overlie a Josephson junction. A structure, for instance a Josephson junction, may be carried on a planarized dielectric layer. A fin may be employed to remove heat from the structure. A via capable of superconducting may have a width that is less than about 1 micrometer. The structure may be coupled to a resistor, for example by vias and/or a strap connector.Type: ApplicationFiled: October 10, 2016Publication date: April 6, 2017Inventors: Eric Ladizinsky, Geordie Rose, Jeremy P. Hilton, Eugene Dantsker, Byong Hyop Oh
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Patent number: 9490296Abstract: Various techniques and apparatus permit fabrication of superconductive circuits and structures, for instance Josephson junctions, which may, for example be useful in quantum computers. For instance, a low magnetic flux noise trilayer structure may be fabricated having a dielectric structure or layer interposed between two elements or layers capable of superconducting. A superconducting via may directly overlie a Josephson junction. A structure, for instance a Josephson junction, may be carried on a planarized dielectric layer. A fin may be employed to remove heat from the structure. A via capable of superconducting may have a width that is less than about 1 micrometer. The structure may be coupled to a resistor, for example by vias and/or a strap connector.Type: GrantFiled: January 5, 2015Date of Patent: November 8, 2016Assignee: D-WAVE SYSTEMS INC.Inventors: Eric Ladizinsky, Geordie Rose, Jeremy P. Hilton, Eugene Dantsker, Byong Hyop Oh
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Publication number: 20150236235Abstract: In one aspect, fabricating a superconductive integrated circuit with a Josephson junction includes applying oxygen or nitrogen to at least part of a structure formed from an outer superconductive layer to passivate an artifact, if any, left from removing the portion of the outer superconductive layer. In another aspect, a first superconductive layer is deposited, a second superconductive layer is deposited on the first superconductive layer, an oxide layer is formed on the first superconductive layer, a dielectric layer is deposited on the oxide layer, a portion of the dielectric layer is removed, a first portion of the oxide layer is removed, a second oxide portion is formed in place of the first portion of the oxide layer, and a third superconductive layer is deposited on the dielectric layer and the second oxide portion.Type: ApplicationFiled: January 20, 2015Publication date: August 20, 2015Inventors: Eric Ladizinsky, Nicolas Ladizinsky, Jason Yao, Byong Hyop Oh, Richard David Neufeld