Abstract: A control apparatus for a linear motion stage includes: a first filter for filtering the frequency of a signal received from a linear encoder of the linear motion stage; an adder for adding an input signal representing a command position and a negative of an output signal of the first filter; a control for generating a control signal for controlling the linear motion stage based on an output signal of the adder; and a second filter for filtering the frequency of the control signal. Each of the input terminals of the first and second filters has a correction table for storing cut-off frequencies and damping rates measured according to the driven positions of the linear motion stage, thereby applying the correction table so as to determine the cut-off frequencies of the first and second filters and the damping rates according to the driven positions of the linear motion stage.

Abstract: In a system for compensating dynamic and thermal deformity errors of a linear motion single-plane gantry stage in real time, a stage apparatus using the system, and manufacturing, measuring, and inspecting apparatuses using the system, the system includes: a first two-dimensional position measuring unit arranged in each of two linear edge beams respectively positioned in both sides of the linear motion single-plane gantry stage for measuring the position of an X-axially movable gantry beam to provide a feedback of an X-axial motion thereof; a second two-dimensional position measuring unit for measuring the position of a Y-axially movable slider movable on the X-axially movable gantry beam to provide a feedback of a Y-axial motion thereof; a thermal fixing point provided as a thermal reference for measuring a thermal expansion of the X-axially movable gantry beam; and a compensation control unit for controlling an error motion of the linear motion single-plane gantry stage in real time by measuring dynamic and

Abstract: In a system for compensating dynamic and thermal deformity errors of a linear motion single-plane gantry stage in real time, a stage apparatus using the system, and manufacturing, measuring, and inspecting apparatuses using the system, the system includes: a first two-dimensional position measuring unit arranged in each of two linear edge beams respectively positioned in both sides of the linear motion single-plane gantry stage for measuring the position of an X-axially movable gantry beam to provide a feedback of an X-axial motion thereof; a second two-dimensional position measuring unit for measuring the position of a Y-axially movable slider movable on the X-axially movable gantry beam to provide a feedback of a Y-axial motion thereof; a thermal fixing point provided as a thermal reference for measuring a thermal expansion of the X-axially movable gantry beam; and a compensation control unit for controlling an error motion of the linear motion single-plane gantry stage in real time by measuring dynamic and

Abstract: A control apparatus for a linear motion stage includes: a first filter for filtering the frequency of a signal received from a linear encoder of the linear motion stage; an adder for adding an input signal representing a command position and a negative of an output signal of the first filter; a control for generating a control signal for controlling the linear motion stage based on an output signal of the adder; and a second filter for filtering the frequency of the control signal. Each of the input terminals of the first and second filters has a correction table for storing cut-off frequencies and damping rates measured according to the driven positions of the linear motion stage, thereby applying the correction table so as to determine the cut-off frequencies of the first and second filters and the damping rates according to the driven positions of the linear motion stage.

Abstract: A random noise signal detecting and filtering method includes: (a) calculating a difference value of data currently being input from a sensor in comparison with previous data stored in a register; (b) comparing the calculated difference value with a critical value; (c) determining whether the calculated difference value is greater than a maximum critical value or less than a minimum critical value; and (d) if the calculated difference value is greater than the maximum critical value or less than the minimum critical value, determining the current data be constitute a random signal and substituting the previous data for the current data.

Abstract: A gantry stage orthogonality error measurement method and error compensation method for homing processing includes: decoding and storing an encoder value of a current position of the Gantry stage that structurally matches an orthogonality; monitoring at least one of (a) sensors for homing processing and (b) encoder index signals respectively set on a master axis and a slave axis of the Gantry stage while the Gantry stage is driven at low speed; and in the event that the index signal is detected, decoding a linear encoder value of at least one of (a) the master axis and (b) slave axis.

Abstract: A random noise signal detecting and filtering method includes: (a) calculating a difference value of data currently being input from a sensor in comparison with previous data stored in a register; (b) comparing the calculated difference value with a critical value; (c) determining whether the calculated difference value is greater than a maximum critical value or less than a minimum critical value; and (d) if the calculated difference value is greater than the maximum critical value or less than the minimum critical value, determining the current data be constitute a random signal and substituting the previous data for the current data.