Patents by Inventor Byoung-Seol Ahn

Byoung-Seol Ahn has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for examining wafers
    Patent number: 6111637
    Abstract: A method and an apparatus for examining wafers includes a wafer cassette having a capacity for holding a plurality of wafers located on each of first and second locaters. The wafer cassettes are fixedly held on the first and second locaters during the wafer examination. A first indicator shows that the wafer cassettes are fixedly held on the first and second locaters. A robot arm sequentially carries each of the wafers between the first locator, an aligner, a scanning chamber and the second locater to examine the wafers. The wafer cassettes are released when the examination is complete, and a second indicator shows that the examination is complete.
    Type: Grant
    Filed: December 18, 1996
    Date of Patent: August 29, 2000
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Young-Ho Lee, Sang-Kyu Hahm, Young-Kyu Lim, Byoung-Seol Ahn