Abstract: A substrate processing apparatus includes: a conveyor belt configured to have an outer surface on which a bottom surface of a substrate is seated; and a polishing head unit configured to face an upper surface of the substrate, wherein the polishing head unit includes: a polishing head connected to a driver; a polishing pad configured to face the polishing head; a polishing pad fixing ring disposed between the polishing head and the polishing pad; and a temperature sensor configured to overlap the polishing pad fixing ring and to be spaced apart from the polishing pad fixing ring.

Abstract: The present invention provides a round chip scale package comprising: a light emitting diode for providing blue light from a side surface and an upper surface thereof; and a three-dimensional fluorescent layer arranged to encompass the side surface and the upper surface of the light emitting diode, thereby converting the blue light emitted from the side surface and the upper surface of the light emitting diode into white light, wherein the three-dimensional fluorescent layer comprises a phosphor and silicon, and an edge region of the three-dimensional fluorescent layer is formed into a round shape.

Abstract: As indicated above, the present invention provides a flameless, portable heating kit. In a typical embodiment, the heat pack contains a liquid activated heating material (e.g., in pack form) and utilizes a recycled heat design. This design includes an opening between a heat chamber and a content chamber where the contents (materials to be heated such as food, or a packet containing food such as a Meal Ready to Eat (MRE)) are placed. The heat materials such as steam, air or liquid are transported through a controlled opening that transfers heat to the heat chamber. The present invention also provides a heat control method that uses a filter or filters that filter by-product materials such as moisture and channels the by-products outside, while keeping the heating liquid material inside of the heat space chamber. Optimal control of the heating (chemical) materials' temperature offers a safe heating experience.

Abstract: Disclosed is a temperature control pouch pack including: a first pack which is filled with a predetermined reaction fluid and a reaction material that react with each other to cause a certain reaction while isolating one of the reaction fluid and the reaction material from the other one; and a second pack which is disposed to exchange heat with the first pack and accommodates an article of which temperature is in need of control.

Abstract: The present invention provides a flameless, portable heating container. In a typical embodiment, the heating container contains a liquid activated heating material (e.g., in pack or disk form) and utilizes a recycled heating design. The design includes a set of chambers or compartments such a: a first compartment for holding a material to be heated; a second compartment containing an activation liquid; and a third compartment comprising a protrusion and a liquid activated heating material activated by the activation liquid, the protrusion being configured to puncture a divider between the second compartment and the third compartment so that the activation liquid contacts and activates the liquid activated heating material. It is understood that for the purposes of this disclosure, the terms chamber and compartment may be used interchangeably.

Abstract: As indicated above, the present invention provides a flameless, portable heating kit. In a typical embodiment, the heat pack contains a liquid activated heating material (e.g., in pack form) and utilizes a recycled heat design. This design includes an opening between a heat chamber and a content chamber where the contents (materials to be heated such as food, or a packet containing food such as a Meal Ready to Eat (MRE)) are placed. The heat materials such as steam, air or liquid are transported through a controlled opening that transfers heat to the heat chamber. The present invention also provides a heat control method that uses a filter or filters that filter by-product materials such as moisture and channels the by-products outside, while keeping the heating liquid material inside of the heat space chamber. Optimal control of the heating (chemical) materials' temperature offers a safe heating experience.

Abstract: Disclosed is a temperature control pouch pack including: a first pack which is filled with a predetermined reaction fluid and a reaction material that react with each other to cause a certain reaction while isolating one of the reaction fluid and the reaction material from the other one; and a second pack which is disposed to exchange heat with the first pack and accommodates an article of which temperature is in need of control.