Patents by Inventor Byung-Cheol Cha

Byung-Cheol Cha has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of and apparatus for analyzing ions adsorbed on surface of mask
    Patent number: 7842916
    Abstract: A method of analyzing ions adsorbed on a surface of a mask for pattern formation of a semiconductor device, and an apparatus using the same are disclosed. The ion analyzing method includes: filling a heating container within a main chamber with a predetermined amount of a solvent; immersing a mask in the solvent-filled heating container; raising an internal pressure of the chamber to a predetermined level by supplying gas into the chamber; separating ions from a surface of the mask by heating the solvent within the heating container at a predetermined temperature for a predetermined period; and analyzing the ions by collecting the solvent.
    Type: Grant
    Filed: August 22, 2008
    Date of Patent: November 30, 2010
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Dong-Hun Lee, Hae-Young Jeong, Byung-Cheol Cha, Sung-Jae Han
  • METHOD OF AND APPARATUS FOR ANALYZING IONS ADSORBED ON SURFACE OF MASK
    Publication number: 20090101811
    Abstract: A method of analyzing ions adsorbed on a surface of a mask for pattern formation of a semiconductor device, and an apparatus using the same are disclosed. The ion analyzing method includes: filling a heating container within a main chamber with a predetermined amount of a solvent; immersing a mask in the solvent-filled heating container; raising an internal pressure of the chamber to a predetermined level by supplying gas into the chamber; separating ions from a surface of the mask by heating the solvent within the heating container at a predetermined temperature for a predetermined period; and analyzing the ions by collecting the solvent.
    Type: Application
    Filed: August 22, 2008
    Publication date: April 23, 2009
    Applicant: Samsung Electronics Co., Ltd.
    Inventors: Dong-Hun Lee, Hae-Young Jeong, Byung-Cheol Cha, Sung-Jae Han