Abstract: A substrate treatment apparatus according to an aspect of the present invention includes: a support plate that supports a substrate and is provided with a heater member for heating the substrate; and a cooling unit for forcedly cooling the support plate, wherein the cooling unit includes: a cooling housing to provide a cooling space; a plurality of gas feed nozzles that is arranged in the cooling housing and supplies cooling gas toward the heater member; and a plurality of gas feed lines that is directly connected to the gas feed nozzles and supplies the cooling gas transferred from the outside to the gas feed nozzles.

Abstract: A control apparatus includes a Wi-Fi communication module, a processor, a controller that controls a component of a vehicle, and a memory, wherein the memory stores at least one piece of position information corresponding to a position in the vehicle, and at least one registered pattern of a gesture, face, or shape, the Wi-Fi communication module transmits a transmission signal to the position corresponding to the at least one piece of position information by a Wi-Fi communication method at a preset frequency and receives a reflection signal reflected from an object in response to the transmission signal, the processor acquires an input pattern of a gesture, face, or shape of the object by analyzing the reflection signal, and retrieves a registered pattern matching the input pattern from the at least one registered pattern, and the controller controls the component according to an instruction corresponding to the retrieved registered pattern.

Abstract: A composition, and method for using the composition, in the fabrication of an electronic device, and particularly for depositing a film comprising silicon and boron having low dielectric constant (<6.0) and high oxygen ash resistance. The film includes silicon and boron and may be, without limitation, a silicon borocarboxide, a silicon borocarbonitride, a silicon boroxide, or a silicon borocarboxynitride.

Abstract: A display device includes a display layer having a plurality of light-emitting diodes and an encapsulation layer covering a light-emitting side of the display layer. The encapsulation layer includes a plurality of first polymer projections on display layer, the plurality of first polymer projections having spaces therebetween, and a first dielectric layer conformally covering the plurality of first polymer projections and any exposed underlying surface in the spaces between the first polymer projections, the dielectric layer forming side walls along sides of the first polymer projections and defining wells in spaces between the side walls.

Abstract: A time shift apparatus and method for a digital multimedia broadcasting (DMB) terminal are disclosed wherein bookmarks are automatically placed at individual programs during time-shift recording of broadcast data, thereby enabling movement between programs. A broadcast data recording method comprises performing, in response to a request for a time-shift/bookmark operation during reception of DMB broadcast data, a time-shift operation; finding start times of individual programs in the broadcast data during the time-shift operation; and inserting a bookmark at each program and storing the broadcast data.

Abstract: A method is described for forming an n-MOSFET with a fully silicided Hf suicide gate electrode that has a work function essentially the same as n+ polysilicon. An in-situ phosphorous doped polysilicon film is deposited on a gate dielectric layer on a CMOS substrate and annealed at 900° C. After native oxides are removed, a Hf layer is sputter deposited on the doped polysilicon. A W capping layer is formed on the Hf layer to prevent oxidation during a subsequent silicidation. Following the silicidation, W and unreacted Hf are removed. A permanent TaN capping layer is deposited on the HfSi layer to suppress oxidation and reduce sheet resistance. There is no meaningful change in EOT or flat band voltage even after a RTA at 950° C. for 30 seconds. The resulting Hf silicide has a composition ratio of 0.9 according to RBS and has a work function of about 4.23 eV.

Abstract: The present invention relates to a composition for bone-filling, more particularly, to a bone-filling composition for stimulating bone-formation and bone consolidation comprising calcium sulfate and viscous biopolymers. The composition of the present invention can easily be administered into the missing part of injured bone. Since the composition of the present invention does not diffuse to surrounding organs, it can effectively be used for bone-filling material suitable for body.

Abstract: The present invention relates to a composition for stimulating bone-formation and bone-consolidation, more particularly, to a composition for stimulating bone-formation and bone-consolidation by adding a material for stimulating bone-forming and bone-consolidation to the mixture of tripolyphosphate and water-soluble chitosan. The composition of the present invention can stimulate bone-formation and bone-consolidation in early stages.

Abstract: A process is described to form a semiconductor device such as MOSFET or CMOS with shallow junctions in the source/drain extension regions. After forming the shallow trench isolations and the gate stack, sidewall dielectric spacers are removed. A pre-amorphizing implant (PAI) is performed with Ge+ or Si+ ions to form a thin PAI layer on the surface of the silicon regions adjacent to the gate stack. B+ ion implantation is then performed to form source/drain extension (SDE) regions. The B+ implant step is then followed by multiple-pulsed 248 nm KrF excimer laser anneal with pulse duration of 23 ns. This step is to reduce the sheet resistance of the junction through the activation of the boron dopant in the SDE junctions. Laser anneal is then followed by rapid thermal anneal (RTA) to repair the residual damage and also to induce out-diffusion of the boron to yield shallower junctions than the just-implanted junctions prior to RTA.

Abstract: The present invention discloses a carbon-porous media composite electrode material, a composite electrode using the same and a preparation method thereof. The carbon-porous media composite electrode can be applied for a device such as a secondary battery, a capacitor or the like, or for preparing ultra pure water using a capacitive deionization process, purifying salty water or the like.

Abstract: Provided is a method of depositing a thin film on a wafer.

Abstract: A battery charging device for providing a fast charging a rechargeable battery and controlling the charging process to prevent overcharging. The battery charging device detects a decrease in the voltage of the rechargeable battery as it is being charged and approaches a full charge, and modulates the switching of a switching power supply supplying current to the rechargeable battery in response thereto. The battery charging device has a first resistor in series with the rechargeable battery which is to be charged, a power supply which charges the rechargeable battery, a charging control unit which detects a decrease in the voltage across the rechargeable battery using capacitors and which outputs battery condition signals and battery error signals in response thereto, and a power supply control unit which accepts a mode change signal and a battery error signal from the charging control unit and outputs a control signals for controlling the power supply.

Abstract: Secondary batteries, also called rechargeable batteries, are subject to damage from overcharging during rapid charging. A fully-charged condition of a battery undergoing recharging, for example a NiCd or NiMH battery, is detected by a signature drop in battery voltage called a negative delta voltage (NDV). Low-cost analog circuits and methods are disclosed for detecting the NDV. Op amp circuits are arranged to charge one capacitor while the battery voltage is rising to determine a peak voltage, and charge another capacitor while the battery voltage is falling below the peak voltage. The second capacitor voltage is compared to a reference voltage to determine when the battery voltage drop exceeds a predetermined NDV, indicating a fully-charged battery. The invention is useful in battery chargers, battery conditioners, and the like.