Abstract: An ink-jet printhead and a manufacturing method thereof include a substrate on which an ink chamber having a predetermined volume is formed, a passage for supplying ink to the ink chamber which is formed on a bottom of the ink chamber, a nozzle plate which includes a nozzle corresponding to a center of the ink chamber and at least two insulating layers formed on the substrate, a bubble guide formed inside the nozzle plate and extending from the nozzle into the ink chamber, and a heater which surrounds the nozzle and is disposed between the two insulating layers. A hydrophobic coating layer is formed on a surface of a uppermost layer of the nozzle plate, and a droplet ejecting portion that has a diameter smaller than that of the nozzle of the nozzle plate and is disposed on the same axis as the nozzle, is formed in the hydrophobic coating layer.

Abstract: An ink-jet printhead includes a substrate on which an ink chamber is formed, and a nozzle plate to cover the ink chamber, having a nozzle through which ink droplets are ejected from the ink chamber, and formed of a stack of a multi-layer insulating layer. The ink-jet printhead also includes a heater buried in the nozzle plate to surround the nozzle, an interconnection layer buried in the nozzle plate to electrically connect to the heater, and a coating layer formed of photoresist on the nozzle plate and having a through hole-type droplet guide connected to the nozzle of the nozzle plate. The droplet guide is formed through the coating layer, which has a sufficient thickness, and enables a meniscus of ink to be rapidly restored and stabilized, and ink droplets to be ejected at a high speed and high frequency. Also, the ink-jet printhead has improved resistance to abrasion and chemicals.

Abstract: A method of manufacturing an inkjet printhead includes preparing a substrate having a heater to hear ink and an electrode to supply current to the heater, applying a crosslinked polymer resist composition to the substrate having the heater and the electrode and patterning the same, and forming a passage forming layer that surrounds an ink passage, patterning the substrate having the passage forming layer by photolithography at least twice, and forming a sacrificial layer having a planarized top surface in a space surrounded by the passage forming layer, applying the crosslinked polymer resist composition to the passage forming layer and the sacrificial layer and patterning the same, and forming a nozzle layer having a nozzle, etching the substrate from the bottom surface thereof to be perforated, and forming an ink supply hole, and removing the sacrificial layer, wherein the crosslinked polymer resist composition comprises a precursor polymer that is a phenolic novolak resin having glycidyl ether functional g

Abstract: An inkjet printhead includes a substrate having an ink chamber which is filled with ink to be ejected, a nozzle plate formed on the substrate in a position corresponding to the ink chamber, and a heat generating resistor installed in the ink chamber and formed of TiNx, where x ranges from 0.2 to 0.5, to generate ink bubbles in the ink by generating heat.

Abstract: A method of manufacturing a monolithic inkjet printhead wherein the uniformity of the ink flow path is maintained by ensuring that the flow path forming layer and the nozzle layer are completely adhered to each other. The method includes forming a heater and electrode on a substrate, coating a negative photoresist on the substrate, and patterning the photoresist using a photolithography process to form an flow path forming layer that defines an ink flow path. The method further comprises steps for then forming a sacrificial layer so as to cover the flow path forming layer and then flattening upper surfaces of the flow path forming layer and the sacrificial layer using a chemical mechanical polishing (CMP) process such that when a nozzle layer is then formed, the flow path forming layer and the nozzle layer are completely adhered to each other.

Abstract: A method of manufacturing an inkjet printhead includes forming a first photoresist layer on a substrate having ink ejection devices disposed thereon by coating the substrate with a first negative photoresist, exposing the first photoresist layer through a first photomask formed that defines a pattern of ink chambers, forming a second photoresist layer on the first photoresist layer by coating the first photoresist layer with a second negative photoresist, exposing the second photoresist layer through a second photomask that defines a pattern of nozzles, forming a nozzle layer having the nozzles by developing the second photoresist layer, forming the ink chambers by developing the first photoresist layer through the nozzles, and forming an ink supply path by etching a lower surface of the substrate.

Abstract: An ink-jet printhead and a manufacturing method thereof include a substrate on which an ink chamber having a predetermined volume is formed, a passage for supplying ink to the ink chamber which is formed on a bottom of the ink chamber, a nozzle plate which includes a nozzle corresponding to a center of the ink chamber and at least two insulating layers formed on the substrate, a bubble guide formed inside the nozzle plate and extending from the nozzle into the ink chamber, and a heater which surrounds the nozzle and is disposed between the two insulating layers. A hydrophobic coating layer is formed on a surface of a uppermost layer of the nozzle plate, and a droplet ejecting portion that has a diameter smaller than that of the nozzle of the nozzle plate and is disposed on the same axis as the nozzle, is formed in the hydrophobic coating layer.

Abstract: An inkjet printer head includes a substrate having a manifold and an ink channel to supply ink, a nozzle plate formed on the substrate, a chamber formed between the substrate and the nozzle plate and extending toward the substrate and the nozzle plate, an electrode formed at an interface between the substrate and the nozzle plate and around the chamber, and a heater having both ends extending in contact with the electrode to be suspended on the chamber in direct contact with the ink and to generate bubbles from both surfaces thereof. The inkjet printer head is capable of improving manufacturing process efficiency by omitting a process of separately forming a heater passivation layer, operating the heater at low electric power by omitting the heater passivation layer, improving integrity of a nozzle by lowering a working voltage, and improving reliability in manufacturing processes by locating the suspended heater to be in parallel with the substrate and the electrode.

Abstract: A filter plate usable with an ink jet head, an ink jet head with the filter plate, and a method of fabricating the filter plate are provided. The filter plate includes a filter substrate having a filter hole region. Filter holes having angled line shapes extend through the filter substrate of the filter hole region. Each of the filter holes may include an upper filter hole formed to have a first angle with respect to the filter substrate at an upper portion of the filter substrate, and a lower filter hole formed at a lower portion of the filter substrate to be connected to the upper filter hole and having a second angle with respect to the filter substrate different from the first angle.

Abstract: An inkjet printer head and method of fabricating the same includes a substrate having an ink-feed hole formed at a bottom surface of the substrate, a lower chamber formed at a top surface of the substrate, and a restrictor to fluid communicate between the ink-feed hole and the lower chamber, an oxide layer formed on the substrate, a heater formed on the oxide layer and disposed parallel to the surface of the substrate to cross the lower chamber, a lead electrically connected to the heater, and a nozzle layer disposed on the heater to configure an ink channel together with the lower chamber and having a nozzle at an upper portion of the nozzle layer. The inkjet printer head is capable of improving a thermal efficiency by heating the ink using both surfaces of the heater since the heater is disposed at a center of the ink chamber, and improving characteristics of the heater by making a current density and a current flow uniform since the heater is formed in a straight line without any bent or curved portion.

Abstract: An inkjet printer head includes a substrate having an ink-feed hole to supply ink stored in a cartridge to an ink chamber and a restrictor in fluid communication with the ink chamber, an oxide layer formed on the substrate, a heater disposed on the oxide layer above the restrictor and having fixed parts disposed on the oxide layer, slopes extending upward and away from the restrictor at an incline, and a parallel part extending between the slopes parallel to the substrate, a lead formed to be in electrical contact with the heater, a chamber layer formed to cover the lead and to define the ink chamber, and a nozzle layer formed on the chamber layer and having a nozzle. In the inkjet printer head, the lifespan of the heater may be extended since the heater is supported by the slopes, which function as a shock absorbing member when ink supply pressure or cavitation force is applied to a surface of the heater.

Abstract: A method of manufacturing a monolithic inkjet printhead. The method may include forming on a substrate a heater for heating ink and an electrode for supplying current to the heater, forming a passage forming layer that surrounds an ink passage by applying negative-type photoresist to the substrate and patterning the same, forming a sacrificial layer having a planarized top surface in a space surrounded by the passage forming layer by repeatedly applying a positive-type photoresist to the substrate having the passage forming layer and patterning the same by photolithography at least twice, forming a nozzle layer having a nozzle by applying a negative-type photoresist to the passage forming layer and the sacrificial layer and patterning the same, etching the substrate from the bottom surface thereof to be perforated and forming an ink supply hole, and removing the sacrificial layer.

Abstract: An inkjet print head with a high efficiency heater includes a substrate having an ink-feed hole extending therethrough to receive ink stored in a cartridge, a flow path layer to define an ink chamber in fluid communication with the ink-feed hole, a nozzle plate having a nozzle to discharge the ink from the ink chamber to an exterior, a heater located adjacent to an inner wall of the ink chamber and disposed in contact with the ink in the ink chamber, and a lead electrically connected to the heater. The heater increases thermal efficiency and maintains a stable structure. In addition, since the heater is disposed adjacent to the inner wall of the ink chamber, the heater is barely affected by the ink supply pressure or the cavitation force that results from ink bubbles shrinking.

Abstract: A method of fabricating an inkjet print head including forming an energy-generating element to eject ink on a substrate. A chamber layer and a nozzle layer having a nozzle corresponding to the energy-generating element are formed on the substrate. At least one layer of the chamber layer and the nozzle layer is formed using a photo-curable resin composition containing a photo-radical generator, an epoxy resin curable by reaction with a radical, and a non-photo reactive solvent.

Abstract: An ink-jet printhead and a manufacturing method thereof include a substrate on which an ink chamber having a predetermined volume is formed, a passage for supplying ink to the ink chamber which is formed on a bottom of the ink chamber, a nozzle plate which includes a nozzle corresponding to a center of the ink chamber and at least two insulating layers formed on the substrate, a bubble guide formed inside the nozzle plate and extending from the nozzle into the ink chamber, and a heater which surrounds the nozzle and is disposed between the two insulating layers. A hydrophobic coating layer is formed on a surface of a uppermost layer of the nozzle plate, and a droplet ejecting portion that has a diameter smaller than that of the nozzle of the nozzle plate and is disposed on the same axis as the nozzle, is formed in the hydrophobic coating layer.

Abstract: A method of fabricating an ink jet head. The method includes preparing a substrate having first and second surfaces, the substrate being provided with a plurality of pressure-generating elements disposed on the first surface. A mask pattern having at least one opening is formed on the first surface on which the pressure-generating elements are disposed. The method further includes forming an ink-feed channel that extends through the substrate from the first surface by using the mask pattern as an etch mask. The method is capable of improving yield and reliability of the ink jet head since the shape and dimension of the ink-feed channel may be uniformly and reproducibly adjusted.

Abstract: A photo-curable resin composition, a method of patterning the same, an ink jet head, and a method of fabricating the same. The photo-curable resin composition includes an epoxy compound, a photo-catalyst provided as a photo-initiator, and a non-photo reactive solvent. The photo-catalyst may be a semiconductor material to generate electron-hall pairs using light energy. The semiconductor material is one selected from a group consisting of TiO2, CdS, Si, SrTiO3, WO, ZnO, SnO2, CdSe and CdTe, CdSe and CdTe. The epoxy compound may include a di-functional epoxy compound and a multi-functional epoxy compound. The non-photo reactive solvent may be one or a mixture selected from a group consisting of gamma-butyrolactone (GBL), cyclopentanone, C1-6 acetate, tetrahydrofurane (THF), and xylene. The photo-curable resin composition is patterned to form a fluid channel structure of the ink jet head.

Abstract: An ink-jet printhead includes a substrate on which an ink chamber is formed, and a nozzle plate to cover the ink chamber, having a nozzle through which ink droplets are ejected from the ink chamber, and formed of a stack of a multi-layer insulating layer. The ink-jet printhead also includes a heater buried in the nozzle plate to surround the nozzle, an interconnection layer buried in the nozzle plate to electrically connect to the heater, and a coating layer formed of photoresist on the nozzle plate and having a through hole-type droplet guide connected to the nozzle of the nozzle plate. The droplet guide is formed through the coating layer, which has a sufficient thickness, and enables a meniscus of ink to be rapidly restored and stabilized, and ink droplets to be ejected at a high speed and high frequency. Also, the ink-jet printhead has improved resistance to abrasion and chemicals.

Abstract: A method of manufacturing a monolithic inkjet printhead wherein the uniformity of the ink flow path is maintained by ensuring that the flow path forming layer and the nozzle layer are completely adhered to each other. The method includes forming a heater and electrode on a substrate, coating a negative photoresist on the substrate, and patterning the photoresist using a photolithography process to form an flow path forming layer that defines an ink flow path. The method further comprises steps for then forming a sacrificial layer so as to cover the flow path forming layer and then flattening upper surfaces of the flow path forming layer and the sacrificial layer using a chemical mechanical polishing (CMP) process such that when a nozzle layer is then formed, the flow path forming layer and the nozzle layer are completely adhered to each other.

Abstract: An ink-jet printhead includes a substrate on which an ink chamber is formed, and a nozzle plate to cover the ink chamber, having a nozzle through which ink droplets are ejected from the ink chamber, and formed of a stack of a multi-layer insulating layer. The ink-jet printhead also includes a heater buried in the nozzle plate to surround the nozzle, an interconnection layer buried in the nozzle plate to electrically connect to the heater, and a coating layer formed of photoresist on the nozzle plate and having a through hole-type droplet guide connected to the nozzle of the nozzle plate. The droplet guide is formed through the coating layer, which has a sufficient thickness, and enables a meniscus of ink to be rapidly restored and stabilized, and ink droplets to be ejected at a high speed and high frequency. Also, the ink-jet printhead has improved resistance to abrasion and chemicals.