Patents by Inventor Byung Han Yun

Byung Han Yun has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sputtering apparatus, method of operating the same, and method of manufacturing substrate using the same
    Patent number: 8741116
    Abstract: A sputtering apparatus includes a susceptor for receiving a substrate, and a first target device disposed to be opposite to a center region of a substrate and at least second and third target devices disposed to be opposite to peripheral regions of the substrate, wherein the second and third target devices are rotatable.
    Type: Grant
    Filed: September 21, 2011
    Date of Patent: June 3, 2014
    Assignees: LG Display Co., Ltd., AVACO Co., Ltd., LG Electronics Inc.
    Inventors: Tae Hyun Lim, Hwan Kyu Yoo, Byung Han Yun
  • SPUTTERING APPARATUS, METHOD OF OPERATING THE SAME, AND METHOD OF MANUFACTURING SUBSTRATE USING THE SAME
    Publication number: 20120006266
    Abstract: A sputtering apparatus includes a susceptor for receiving a substrate, and a first target device disposed to be opposite to a center region of a substrate and at least second and third target devices disposed to be opposite to peripheral regions of the substrate, wherein the second and third target devices are rotatable.
    Type: Application
    Filed: September 21, 2011
    Publication date: January 12, 2012
    Inventors: Tae Hyun LIM, Hwan Kyu YOO, Byung Han YUN
  • Sputtering apparatus, method of operating the same, and method of manufacturing substrate using the same
    Patent number: 8052850
    Abstract: A sputtering apparatus includes a susceptor for receiving a substrate, and a first target device disposed to be opposite to a center region of a substrate and at least second and third target devices disposed to be opposite to peripheral regions of the substrate, wherein the second and third target devices are rotatable.
    Type: Grant
    Filed: May 21, 2007
    Date of Patent: November 8, 2011
    Assignees: LG Display Co., Ltd., AVACO Co., Ltd., LG Electroncs Inc.
    Inventors: Tae Hyun Lim, Hwan Kyu Yoo, Byung Han Yun
  • Inclined carrier transferring apparatus
    Patent number: 8007644
    Abstract: An inclined carrier transferring apparatus for use inline sputtering equipment. The inclined carrier transferring apparatus includes rollers and a guiding portion. The rollers transfer and support the bottom of a carrier. The guiding portion is installed diagonally with respect to the rollers, to support the top of the carrier in a non-contact manner.
    Type: Grant
    Filed: June 16, 2006
    Date of Patent: August 30, 2011
    Assignee: LG Display Co., Ltd.
    Inventors: Sung Eun Kim, Tae Hyun Lim, Kwang Jong Yoo, Byung Han Yun, Yang Sik Moon
  • Sputtering apparatus, method of driving the same, and method of manufacturing substrate using the same
    Patent number: 7981263
    Abstract: A sputtering apparatus includes a susceptor having a substrate and a plurality of target devices facing the substrate and substantially parallel to each other, each target device being rotatable.
    Type: Grant
    Filed: May 7, 2007
    Date of Patent: July 19, 2011
    Assignee: LG Display Co., Ltd.
    Inventors: Hyuk Sang Yoon, Hwan Kyu Yoo, Byung Han Yun
  • Sputtering apparatus
    Patent number: 7708866
    Abstract: A sputtering apparatus comprises a substrate unit that includes a substrate on which a target material is deposited in a chamber and a target unit on which a plurality of target sections formed of the target material are arranged. The sputtering apparatus further comprises a cathode plate that supplies electric power to surfaces of the plurality of target sections and a plurality of gas supply ports provided on regions between the plurality of target sections.
    Type: Grant
    Filed: June 21, 2006
    Date of Patent: May 4, 2010
    Assignee: LG. Display Co., Ltd.
    Inventors: Sung Eun Kim, Cheon Soo Lee, Hwan Kyu Yoo, Byung Han Yun
  • Sputtering apparatus, method of driving the same, and method of manufacturing substrate using the same
    Publication number: 20070256933
    Abstract: A sputtering apparatus includes a susceptor having a substrate and a plurality of target devices facing the substrate and substantially parallel to each other, each target device being rotatable.
    Type: Application
    Filed: May 7, 2007
    Publication date: November 8, 2007
    Applicant: LG.Philips LCD Co., Ltd.
    Inventors: Hyuk Sang Yoon, Hwan Kyu Yoo, Byung Han Yun