Abstract: A drop mass deviation measuring apparatus, a drop mass deviation measuring method, a pattern forming system, and a control method measure mass deviations of drops discharged from a plurality of drop discharge units in real time with high precision. The apparatus utilizes a plurality of drops discharged from a plurality of drop discharge units, a drop moving force providing part to provide moving forces, having directions different from discharge directions of each of the plurality of drops, to the plurality of drops, a discharged drop position detection member to acquire drop position images individually reflecting the a position of each of the plurality of drops, and a drop mass deviation measurement control part to calculate a drop discharge direction separation angle of each of the plurality of drops using the drop position images acquired by the discharged drop position detection member to measure mass deviation of each of the drops.

Abstract: A drop mass deviation measuring apparatus, a drop mass deviation measuring method, a pattern forming system, and a control method measure mass deviations of drops discharged from a plurality of drop discharge units in real time with high precision. The apparatus utilizes a plurality of drops discharged from a plurality of drop discharge units, a drop moving force providing part to provide moving forces, having directions different from discharge directions of each of the plurality of drops, to the plurality of drops, a discharged drop position detection member to acquire drop position images individually reflecting the a position of each of the plurality of drops, and a drop mass deviation measurement control part to calculate a drop discharge direction separation angle of each of the plurality of drops using the drop position images acquired by the discharged drop position detection member to measure mass deviation of each of the drops.

Abstract: A transfer apparatus includes at least four fine actuators each having a coil assembly with a wound coil, and a pair of movable magnets having different polarities and spaced from each other to interpose the coil assembly therebetween, a coil supporter to support the at least four coil assemblies so that the fine actuators are arranged in a pair of groups thereof symmetrically with respect to a predetermined straight line, a magnet supporter to support the at least four movable magnets corresponding to the respective coil assemblies, and a controller to control the fine actuator to move one of the coil supporter and the magnet supporter with respect to the other one. With this configuration, a transfer apparatus can perform a super-precision positioning control by decreasing a positioning control error.

Abstract: A transporting apparatus which can horizontally transport a carrier using an air bearing of which a rotational degree of freedom is kept relative to a surface of a base. The transporting apparatus is movable along a surface of a base and includes an air bearing placed on a base, a connector connected to an upper part of the air bearing and provided with a supporter in a center thereof, the supporter having a flexure hinge structure to allow the air bearing to be freely rotated relative to the base, and the carrier supported by the supporter of the connector to be transported while keeping a level with respect to the surface of the base. With this configuration, a movement of the air bearing does not affect the carrier, thereby improving accuracy and reliability of the transporting apparatus.

Abstract: A stage apparatus may include a first stage, a second stage movable with respect to the first stage, at least one flexure hinge to connect the first stage with the second stage, a plurality of actuators provided between the first stage and the second stage to push the first stage and the second stage and to be symmetric with respect to a center of the first stage and the second stage, and a controller to control the plurality of actuators to move one of the first stage and the second stage with respect to the other one of the first stage and the second stage. Thus, a position error of the stage can be reduced, which enables an ultra precision position control. Further, a piezoelectric driver using piezoelectric elements may be used as the actuator to decrease the position error more than a conventional driver such as a motor. The position error may be decreased to ±10 nm.

Abstract: A transfer apparatus includes at least four fine actuators each having a coil assembly with a wound coil, and a pair of movable magnets having different polarities and spaced from each other to interpose the coil assembly therebetween, a coil supporter to support the at least four coil assemblies so that the fine actuators are arranged in a pair of groups thereof symmetrically with respect to a predetermined straight line, a magnet supporter to support the at least four movable magnets corresponding to the respective coil assemblies, and a controller to control the fine actuator to move one of the coil supporter and the magnet supporter with respect to the other one. With this configuration, a transfer apparatus can perform a super-precision positioning control by decreasing a positioning control error.

Abstract: A transporting apparatus which can horizontally transport a carrier using an air bearing of which a rotational degree of freedom is kept relative to a surface of a base. The transporting apparatus is movable along a surface of a base and includes an air bearing placed on a base, a connector connected to an upper part of the air bearing and provided with a supporter in a center thereof, the supporter having a flexure hinge structure to allow the air bearing to be freely rotated relative to the base, and the carrier supported by the supporter of the connector to be transported while keeping a level with respect to the surface of the base. With this configuration, a movement of the air bearing does not affect the carrier, thereby improving accuracy and reliability of the transporting apparatus.