Patents by Inventor Byung-Soo Soo

Byung-Soo Soo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CANISTER FOR DEPOSITION APPARATUS AND DEPOSITION APPARATUS USING SAME
    Publication number: 20120000986
    Abstract: A canister for a deposition apparatus and a deposition apparatus using the same, and more particularly, a canister for a deposition apparatus that can provide a uniform amount of source material contained in a reaction gas supplied into a deposition chamber and improve safety in the supply of the source material, and a deposition apparatus using the canister. The deposition apparatus includes a deposition chamber; a canister supplying a reaction gas into the deposition chamber; and a carrier gas supplier for supplying a carrier gas into the canister, in which the canister includes a main body, a heating unit heating the main body and a temperature measuring unit disposed under the main body.
    Type: Application
    Filed: January 19, 2011
    Publication date: January 5, 2012
    Applicant: Samsung Mobile Display Co., Ltd
    Inventors: Min-Jae JEONG, Ki-Yong Lee, Jong-Won Hong, Heung-Yeol Na, Eu-Gene Kang, Seok-Rak Chang, Jin-Wook Seo, Tae-Hoon Yang, Yun-Mo Chung, Byung-Soo Soo, Byoung-Keon Park, Dong-Hyun Lee, Kil-Won Lee, Won-Bong Baek, Jong-Ryuk Park, Bo-Kyung Choi, Ivan Maidanchuk, Jae-Wan Jung