Abstract: Provided are an apparatus for photographing plasma particles and a method for detecting an etch endpoint using the apparatus. The method includes: receiving, according to time, a captured image of particles in a plasma chamber in which a thin film on a wafer is being etched; calculating a number of pixels within a predetermined grayscale range in the captured image; calculating, according to points of time, an accumulated average value of the number of pixels up to a current point of time; and detecting an etch endpoint that is a completion time of etching by using the accumulated average value calculated according to points of time.

Abstract: The application of a piezoceramic resonator (PR), connected in parallel to a discharge lamp and in series to cathode filaments of a lamp, provides reliable means of preheating of cathode filaments facilitating a soft start of a fluorescent lamp. The piezoceramic resonator is a polarized piezoceramic element formed in a form of rectangular plate, disk, cylinder, etc. The linear size and shape of the PR determine the type of oscillation, electromechanical resonant frequency and frequency characteristics. The PRs with radial, contour or longitudinal oscillations are best suited for application to a piezoelectronic ballast. Piezoceramic resonators and filters as frequency-selective elements in measuring and radio communication instruments are widely used in weak alternating electrical fields, where the intensity of field does not exceed an order of volts per mm.