Patents by Inventor C.C. Tu

C.C. Tu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Target mounting apparatus for vapor deposition system
    Patent number: 5863397
    Abstract: Target mounting apparatus for use in a conventional physical vapor deposition system includes a target assembly, a source mounting plate, means for removably mounting the target assembly on the source mounting plate, and a keying system for preventing mounting of a target assembly which is incompatible with the deposition process intended to be carried out. The keying system includes a male portion formed on either the target assembly or the source mounting plate, and a female portion formed on the other of the target assembly and the source mounting plate. Keying of the target assembly to the source mounting plate is achieved by either forming the male and female portions with unique, mating cross sectional shapes, or by varying the spatial orientation or alignment of the male and female portions. In an alternate embodiment, a key pin is positionable in any of a plurality of positions on the source mounting plate, respectively corresponding to differing target assemblies.
    Type: Grant
    Filed: July 11, 1997
    Date of Patent: January 26, 1999
    Assignee: Taiwan Semiconductor Manufacturing Co Ltd.
    Inventors: C.C. Tu, Y.H. Chen