Abstract: Embodiments described herein relate to magnetic and electromagnetic systems and a method for controlling the density profile of plasma generated in a process volume of a PECVD chamber to affect deposition profile of a film on a substrate and/or facilitate chamber cleaning after processing. In one embodiment, a system is disclosed that includes a rotational magnetic housing disposed about an exterior sidewall of a chamber. The rotational magnetic housing includes a plurality of magnets coupled to a sleeve that are configured to travel in a circular path when the rotational magnetic housing is rotated around the chamber, and a plurality of shunt doors movably disposed between the chamber and the sleeve, wherein each of the shunt doors are configured to move relative to the magnets.

Abstract: A product on demand nozzle assembly includes a chamber at least partially defined by an external wall and an array of vertically spaced nozzles. Each nozzle has an air inlet, an air and entrained product outlet extending from the external wall, and an entrainment zone between the air inlet and the air and entrained product outlet to receive a product therein to be distributed.

Abstract: Embodiments described herein relate to magnetic and electromagnetic systems and a method for controlling the density profile of plasma generated in a process volume of a PECVD chamber to affect deposition profile of a film. In one embodiment, a plurality of retaining brackets is disposed in a rotational magnetic housing of the magnetic housing systems. Each retaining bracket of the plurality of retaining brackets is disposed in the rotational magnetic housing with a distance d between each retaining bracket. The plurality of retaining brackets has a plurality of magnets removably disposed therein. The plurality of magnets is configured to travel in a circular path when the rotational magnetic housing is rotated around the round central opening.

Abstract: Embodiments described herein provide magnetic and electromagnetic housing systems and a method for controlling the properties of plasma generated in a process volume of a process chamber to affect deposition properties of a film. In one embodiment, the method includes rotation of the rotational magnetic housing about a center axis of the process volume to create dynamic magnetic fields. The magnetic fields modify the shape of the plasma, concentration of ions and radicals, and movement of concentration of ions and radicals to control the density profile of the plasma. Controlling the density profile of the plasma tunes the uniformity and properties of a deposited or etched film.

Abstract: Embodiments described herein relate to magnetic and electromagnetic systems and a method for controlling the density profile of plasma generated in a process volume of a PECVD chamber to affect deposition profile of a film. In one embodiment, a plurality of retaining brackets is disposed in a rotational magnetic housing of the magnetic housing systems. Each retaining bracket of the plurality of retaining brackets is disposed in the rotational magnetic housing with a distance d between each retaining bracket. The plurality of retaining brackets has a plurality of magnets removably disposed therein. The plurality of magnets is configured to travel in a circular path when the rotational magnetic housing is rotated around the round central opening.

Abstract: Embodiments of the present disclosure generally relate to apparatus and methods utilized in the manufacture of semiconductor devices. More particularly, embodiments of the present disclosure relate to a substrate processing chamber, and components thereof, for forming semiconductor devices.

Abstract: A horticultural luminaire includes a first and second horticultural light sources to provide growth lighting to a plant at a first and second wavelengths. A control unit provides first lighting control signals to the first horticultural light source to modulate the first growth lighting and provides second lighting control signals to the second horticultural light source to modulate the second growth lighting. A LiDAR sensor is connected to the lighting control unit to receive the first and second control signals, and having optics to detect reflected first and second growth lighting to determine the distance from plant to sensor and a biometric property of the plant from the received first and second control signals and detected first and second reflected second growth lighting. In some implementations the LiDAR sensor and first and second horticultural light sources are integrated into the horticultural luminaire.

Abstract: Embodiments described herein provide magnetic and electromagnetic housing systems and a method for controlling the properties of plasma generated in a process volume of a process chamber to affect deposition properties of a film. In one embodiment, the method includes rotation of the rotational magnetic housing about a center axis of the process volume to create dynamic magnetic fields. The magnetic fields modify the shape of the plasma, concentration of ions and radicals, and movement of concentration of ions and radicals to control the density profile of the plasma. Controlling the density profile of the plasma tunes the uniformity and properties of a deposited or etched film.

Abstract: Embodiments described herein relate to magnetic and electromagnetic systems and a method for controlling the density profile of plasma generated in a process volume of a PECVD chamber to affect deposition profile of a film on a substrate and/or facilitate chamber cleaning after processing. In one embodiment, a system is disclosed that includes a rotational magnetic housing disposed about an exterior sidewall of a chamber. The rotational magnetic housing includes a plurality of magnets coupled to a sleeve that are configured to travel in a circular path when the rotational magnetic housing is rotated around the chamber, and a plurality of shunt doors movably disposed between the chamber and the sleeve, wherein each of the shunt doors are configured to move relative to the magnets.

Abstract: Embodiments described herein provide magnetic and electromagnetic housing systems and a method for controlling the properties of plasma generated in a process volume of a process chamber to affect deposition properties of a film. In one embodiment, the method includes rotation of the rotational magnetic housing about a center axis of the process volume to create dynamic magnetic fields. The magnetic fields modify the shape of the plasma, concentration of ions and radicals, and movement of concentration of ions and radicals to control the density profile of the plasma. Controlling the density profile of the plasma tunes the uniformity and properties of a deposited or etched film.

Abstract: Embodiments of the present disclosure generally relate to apparatus and methods utilized in the manufacture of semiconductor devices. More particularly, embodiments of the present disclosure relate to a substrate processing chamber, and components thereof, for forming semiconductor devices.

Abstract: A horticultural luminaire includes a first and second horticultural light sources to provide growth lighting to a plant at a first and second wavelengths. A control unit provides first lighting control signals to the first horticultural light source to modulate the first growth lighting and provides second lighting control signals to the second horticultural light source to modulate the second growth lighting. A LiDAR sensor is connected to the lighting control unit to receive the first and second control signals, and having optics to detect reflected first and second growth lighting to determine the distance from plant to sensor and a biometric property of the plant from the received first and second control signals and detected first and second reflected second growth lighting. In some implementations the LiDAR sensor and first and second horticultural light sources are integrated into the horticultural luminaire.

Abstract: Embodiments described herein relate to magnetic and electromagnetic systems and a method for controlling the density profile of plasma generated in a process volume of a PECVD chamber to affect deposition profile of a film. In one embodiment, a plurality of retaining brackets is disposed in a rotational magnetic housing of the magnetic housing systems. Each retaining bracket of the plurality of retaining brackets is disposed in the rotational magnetic housing with a distance d between each retaining bracket. The plurality of retaining brackets has a plurality of magnets removably disposed therein. The plurality of magnets is configured to travel in a circular path when the rotational magnetic housing is rotated around the round central opening.

Abstract: Disclosed herein are embodiments of an occupancy monitoring system. The occupancy monitoring system includes a thermal sensor configured to monitor a gate (e.g., entry way) to a space. The thermal sensor includes a pixel array that generates a pixel value for each pixel in the pixel array, and the pixel value corresponds to a quantity of heat or thermal information detected by a pixel. The occupancy monitoring system acquires pixel values for the pixels of the pixel array. The occupancy monitoring system determines whether there is a change in occupancy of the space based on changes to a first region (or first pixel cluster) of the pixel array and a second region (or second pixel cluster) of the pixel array over time. The occupancy monitoring system may adjust lighting, temperature, and/or security systems for the space as the occupancy changes.

Abstract: Methods and systems are described that enable the simultaneous control of lux, correlated color temperature (CCT), and circadian light (CL) emitted by a lighting system. Aspects also include methods for the adjusting the lux, CCT, and CL with respect to the needs and/or desires of a user, including to provide optimal lighting for light related health. Aspects of the present disclosure also include user interfaces for the simultaneous knowledge and control of lux, CCT, and CL.

Abstract: A method for controlling a chromaticity of total light provided by a lighting system includes detecting the total light by a sensor system, determining a component of the total light that is attributable to uncontrolled light, and selecting a calibration for a sensor based on the uncontrolled light, and using the calibration to adjust the output of the sensor system. The calibration tables may be based on spectral responsivity of the sensors in the sensor system and calibration functions rather than physical light sources. Relative intensities of controllable light sources having different xy values are then adjusted to cause the total light provided by the lighting system to approximate a target chromaticity. A daylighting system implementing this method includes controllable light sources with different xy values. The intensities of the controllable light sources are adjusted to augment sunlight to control the chromaticity of total light provided by the daylighting system.

Abstract: Disclosed herein are embodiments of an occupancy monitoring system. The occupancy monitoring system includes a thermal sensor configured to monitor a gate (e.g., entry way) to a space. The thermal sensor includes a pixel array that generates a pixel value for each pixel in the pixel array, and the pixel value corresponds to a quantity of heat or thermal information detected by a pixel. The occupancy monitoring system acquires pixel values for the pixels of the pixel array. The occupancy monitoring system determines whether there is a change in occupancy of the space based on changes to a first region (or first pixel cluster) of the pixel array and a second region (or second pixel cluster) of the pixel array over time. The occupancy monitoring system may adjust lighting, temperature, and/or security systems for the space as the occupancy changes.

Abstract: Systems and methods are provided for determining secondary address information. In one implementation, a method is provided that uses a data processing apparatus. According to the method, a code word is created for a business name and a building default extended delivery code. A data table is searched using the code word and secondary address information is revealed when a match is found between the code word and data stored in the data table.

Abstract: Methods for treating an individual to improve cognitive function are provided. In the subject methods, an effective amount of a noncompetitive GABAA ionophore blocker is administered to the individual, resulting in an improvement in cognitive function of the host. The subject methods find use in a variety of different applications.

Abstract: A method for controlling a chromaticity of total light provided by a lighting system includes detecting the total light by a sensor system, determining a component of the total light that is attributable to uncontrolled light, and selecting a calibration for a sensor based on the uncontrolled light, and using the calibration to adjust the output of the sensor system. The calibration tables may be based on spectral responsivity of the sensors in the sensor system and calibration functions rather than physical light sources. Relative intensities of controllable light sources having different xy values are then adjusted to cause the total light provided by the lighting system to approximate a target chromaticity. A daylighting system implementing this method includes controllable light sources with different xy values. The intensities of the controllable light sources are adjusted to augment sunlight to control the chromaticity of total light provided by the daylighting system.