Patents by Inventor C. R. Selvakumar

C. R. Selvakumar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Low temperature ion-beam assisted deposition methods for realizing SiGe/Si heterostructure
    Patent number: 5633194
    Abstract: A low temperature ion-beam assisted deposition process, comprising the steps of cleaning at least one substrate, subjecting the substrate to a vacuum of at least 2.times.10.sup.-4 Torr, heating the substrate to a temperature of at least 280.degree. C., and directing an ion beam at the substrate, wherein the ion beam comprises ion-associated gas molecules of Si or Ge, so as to grow a thin epitaxial film of Si or Ge on the substrate.
    Type: Grant
    Filed: April 19, 1995
    Date of Patent: May 27, 1997
    Assignee: The University of Waterloo
    Inventors: C. R. Selvakumar, S. Mohajerzadeh, D. E. Brodie