Patents by Inventor C. Shan Xu

C. Shan Xu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11177110
    Abstract: A microscopy system includes a gas cluster beam system configured for generating a beam of gas clusters directed toward a sample to irradiate a sample and mill away successive surface layers from the sample, a scanning electron microscope system configured for irradiating the successive surface layers of the sample with an electron beam and for imaging the successive surface layers of the sample in response to the irradiation of the surface layer, and a processor configured for generating a three dimensional image of the sample based on the imaging of the successive layers of the sample.
    Type: Grant
    Filed: February 6, 2019
    Date of Patent: November 16, 2021
    Assignee: Howard Hughes Medical Institute
    Inventors: Kenneth J. Hayworth, Harald F. Hess, C. Shan Xu, David Peale
  • Patent number: 10600615
    Abstract: A microscopy system for imaging a sample can include a scanning electron microscope system configured for imaging a surface layer of the sample and a focused ion beam system configured for generating an ion beam for milling the surface layer away from a sample after it has been imaged. A movable mechanical shutter can be configured to be moved automatically into a position between the sample and the scanning electron microscope system, so that when the electron beam is not imaging the sample the movable mechanical shutter is positioned between the sample and the scanning electron microscope system.
    Type: Grant
    Filed: January 29, 2018
    Date of Patent: March 24, 2020
    Assignee: Howard Hughes Medical Institute
    Inventors: C. Shan Xu, Kenneth J. Hayworth, Harald F. Hess
  • Publication number: 20190355550
    Abstract: A microscopy system includes a gas cluster beam system configured for generating a beam of gas clusters directed toward a sample to irradiate a sample and mill away successive surface layers from the sample, a scanning electron microscope system configured for irradiating the successive surface layers of the sample with an electron beam and for imaging the successive surface layers of the sample in response to the irradiation of the surface layer, and a processor configured for generating a three dimensional image of the sample based on the imaging of the successive layers of the sample.
    Type: Application
    Filed: February 6, 2019
    Publication date: November 21, 2019
    Inventors: Kenneth J. Hayworth, Harald F. Hess, C. Shan Xu, David Peale
  • Publication number: 20180218878
    Abstract: A microscopy system for imaging a sample can include a scanning electron microscope system configured for imaging a surface layer of the sample and a focused ion beam system configured for generating an ion beam for milling the surface layer away from a sample after it has been imaged. A movable mechanical shutter can be configured to be moved automatically into a position between the sample and the scanning electron microscope system, so that when the electron beam is not imaging the sample the movable mechanical shutter is positioned between the sample and the scanning electron microscope system.
    Type: Application
    Filed: January 29, 2018
    Publication date: August 2, 2018
    Inventors: C. Shan Xu, Kenneth J. Hayworth, Harald F. Hess