Abstract: Provided is a surgical operating system, comprising a surgical tool, an optical sensor arranged on or in the surgical tool and configured to measure a distance (8-x) of the surgical tool from a tissue for a plurality of directions (6-x) and/or for a plurality of mutually separated punctiform spatial regions (7-x), an optical coherence tomography measuring device connected to the optical sensor and configured to determine the respective distance (8-x) from the tissue for the plurality of directions (6-x) and/or punctiform spatial regions (7-x) by means of the sensor and to provide the determined distances (8-x). Also provided are a surgical tool and a method for safeguarding a surgical operation.

Abstract: The formation of compensation elements (7) on an at least partially transparent membrane (2) that provides the actuator elements (5) to compensate or neutralize unwanted deformations of the compartment (3), e.g. induced by gravity effects, and/or to generate positive (convex) deflections of a limiting membrane (14), where the plurality of actuator elements (5) and the at least one compensation element (7) are provided at a common electrode membrane (2).

Abstract: The inventive device (10) can be used for tissue coagulation and/or tissue ablation. It comprises at least one electrode (16) that serves for generating a spark or plasma jet and is connectable to an electric source (20) for this purpose. The probe (11) is assigned to a measuring device (24) that emits and/or receives light in the proximity of the electrode (16) and determines the distance of the probe (11) from the tissue (36) and/or the tissue temperature and/or the composition of the influenced tissue (36). Preferably the measuring device (24) is operated synchronized with pulses or pauses of the pulse-pause-modulated radio frequency voltage (UHF) of the electrode (16) in order to simultaneously carry out the desired measurements during the operation of the instrument (11) and to feedback control the operation of the instrument (11) based on the gained measurement results.

Abstract: The formation of compensation elements (7) on an at least partially transparent membrane (2) that provides the actuator elements (5) to compensate or neutralize unwanted deformations of the compartment (3), e.g. induced by gravity effects, and/or to generate positive (convex) deflections of a limiting membrane (14), where the plurality of actuator elements (5) and the at least one compensation element (7) are provided at a common electrode membrane (2).

Abstract: The inventive device (10) can be used for tissue coagulation and/or tissue ablation. It comprises at least one electrode (16) that serves for generating a spark or plasma jet and is connectable to an electric source (20) for this purpose. The probe (11) is assigned to a measuring device (24) that emits and/or receives light in the proximity of the electrode (16) and determines the distance of the probe (11) from the tissue (36) and/or the tissue temperature and/or the composition of the influenced tissue (36). Preferably the measuring device (24) is operated synchronized with pulses or pauses of the pulse-pause-modulated radio frequency voltage (UHF) of the electrode (16) in order to simultaneously carry out the desired measurements during the operation of the instrument (11) and to feedback control the operation of the instrument (11) based on the gained measurement results.

Abstract: An optical component comprising a mirror array having a multiplicity of mirror elements, which each have at least one degree of freedom of displacement, and which are each connected to at least one actuator for displacement, has a multiplicity of local regulating devices for damping oscillations of the mirror elements, wherein each of the regulating devices in each case has at least one capacitive sensor having at least one moveable electrode and at least one electrode arranged rigidly relative to the carrying structure.

Abstract: An optical module includes a chamber capable of being evacuated and a mirror in the chamber. The mirror includes a plurality of individual mirrors. Each individual mirror includes: a mirror body including a reflection face; a support structure; and a thermally conductive portion that mechanically connects the support structure to the mirror body. For at least one individual mirror, the thermally conductive portion includes a plurality of thermally conductive strips arranged radially, adjacent thermally conductive strips being separated from each other, and each of the plurality of thermally conductive strips connecting the mirror body to the support structure. For at least one individual mirror, an actuator is associated with the mirror body, the actuator being configured to displace the mirror body relative to the support structure in at least one degree of freedom.

Abstract: An optical component comprising a mirror array having a multiplicity of mirror elements, which each have at least one degree of freedom of displacement, and which are each connected to at least one actuator for displacement, has a multiplicity of local regulating devices for damping oscillations of the mirror elements, wherein each of the regulating devices in each case has at least one capacitive sensor having at least one moveable electrode and at least one electrode arranged rigidly relative to the carrying structure.

Abstract: An optical module includes a chamber capable of being evacuated and a mirror in the chamber. The mirror includes a plurality of individual mirrors. Each individual mirror includes: a mirror body including a reflection face; a support structure; and a thermally conductive portion that mechanically connects the support structure to the mirror body. For at least one individual mirror, the thermally conductive portion includes a plurality of thermally conductive strips arranged radially, adjacent thermally conductive strips being separated from each other, and each of the plurality of thermally conductive strips connecting the mirror body to the support structure. For at least one individual mirror, an actuator is associated with the mirror body, the actuator being configured to displace the mirror body relative to the support structure in at least one degree of freedom.

Abstract: An optical module is used to guide an EUV radiation beam. The optical module has a chamber that can be evacuated and at least one mirror accommodated in the chamber. The mirror has a plurality of individual mirrors, the reflection faces of which complement one another to form an overall mirror reflection face. A support structure is in each case mechanically connected via a thermally conductive portion to a mirror body of the respective individual mirror. At least some of the mirror bodies have an associated actuator for the predetermined displacement of the mirror body relative to the support structure in at least one degree of freedom. The thermally conductive portions are configured to dissipate a thermal power density of at least 1 kW/m2 absorbed by the mirror bodies to the support structure.