Patents by Inventor Caijun Su

Caijun Su has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Confocal Chromatic Metrology for EUV Source Condition Monitoring
    Publication number: 20240090110
    Abstract: A light source includes a rotatable drum to be coated with xenon ice and illuminated by a laser beam to produce a plasma. The drum may also be translatable. The light source further includes a confocal chromatic sensor to measure distances from the confocal chromatic sensor to the rotatable drum. The confocal chromatic sensor may include a sensor head to focus light onto the rotatable drum and to detect reflected light from the rotatable drum. The sensor head and the rotatable drum may be disposed within a vacuum chamber.
    Type: Application
    Filed: September 14, 2022
    Publication date: March 14, 2024
    Inventors: Patrick Tae, Caijun Su, Ravichandra Jagannath, Brian Ahr