Abstract: An optomechanical assembly for temperature-robust laser beam processing includes a baseplate and an optics plate. The baseplate includes a source area for accommodating a source of the laser beam, and a light-processing area located away from the source area and including first and second anchor points. The optics plate is disposed in the light-processing area and includes first and second portions and a flexible coupling interconnecting the first and second portions. The first and second portions are fixed to the baseplate at the first and second anchor points, respectively. The flexible coupling allows for a thermally-induced change in distance between the first and second anchor points in the presence of dissimilar thermal expansion of the optics plate and the baseplate. The assembly further includes a series of optical elements for manipulating a laser beam from the laser source. Each of the optical elements is rigidly bonded to the first portion.