Abstract: The present invention discloses a system and method for monitoring and diagnosing a robot mechanism. This requires adding intelligence to the diagnostics by parameters of physical robot arm linkages respecting component relative rotation or load transfer; storing rotation or translation relationship parameters characteristic of resonant frequencies between at least one mechanical link; receiving servo motor signals; digitizing and storing servo known normal data time histories; performing a time domain to frequency domain transformation on signal to identify components which are out-of band limit pre-sets.

Abstract: The present invention discloses a system and method for monitoring and diagnosing a robot mechanism. This requires adding intelligence to the diagnostics by parameters of physical robot arm linkages respecting component relative rotation or load transfer; storing rotation or translation relationship parameters characteristic of resonant frequencies between at least one mechanical link; receiving servo motor signals; digitizing and storing servo known normal data time histories; performing a time domain to frequency domain transformation on signal to identify components which are out-of band limit pre-sets.

Abstract: The present invention describes a system and method for monitoring robotic arm drift in an automatic real-time continuous fashion, having a controller, memory, servo motor with encoder, robotic arm manipulator linkages, position decoder and counter logic for each link, software instructions as logic stored in memory for enabling the robot, under control of the controller for receiving proximity sensor data from at least one set of marker and link mounted sensor pair, storing proximity sensor data from pair in the memory, comparing the pair position with previous samples, and raising an alert signal where the pair disparity exceeds a pre-set limit. The sensor set disparity over time plots the mechanical drift which is continuously monitored in real-time during normal work operation and addressed in real-time.

Abstract: The present invention discloses a system and method for monitoring and diagnosing a robot mechanism. This requires adding intelligence to the diagnostics by parameters of physical robot arm linkages respecting component relative rotation or load transfer; storing rotation or translation relationship parameters characteristic of resonant frequencies between at least one mechanical link; receiving servo motor signals; digitizing and storing servo known normal data time histories; performing a time domain to frequency domain transformation on signal to identify components which are out-of band limit pre-sets.

Abstract: Systems and methods for measuring belt tension in a semiconductor processing system include measuring a natural sound or an acceleration of the belt in the semiconductor processing system; digitizing the natural sound or the acceleration; determining the frequency and characterizing the belt tension as a function of the frequency.

Abstract: Systems and methods are disclosed for analyzing machine operational characteristic by digitizing an electrical parameter associated with a motor; applying a transform operation to the electrical parameter of the motor; and determining failure based on the transform operation.

Abstract: Systems and methods for measuring belt tension in a semiconductor processing system include measuring a natural sound or an acceleration of the belt in the semiconductor processing system; digitizing the natural sound or the acceleration; determining the frequency and characterizing the belt tension as a function of the frequency.