Patents by Inventor Carey Phelps

Carey Phelps has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • TARGET AND ALGORITHM TO MEASURE OVERLAY BY MODELING BACK SCATTERING ELECTRONS ON OVERLAPPING STRUCTURES
    Publication number: 20220005668
    Abstract: An overlay target includes a grating-over-grating structure with a bottom grating structure disposed on a specimen and a top grating structure disposed on the bottom grating structure. The overlay target further includes a calibration scan location including the bottom grating structure but not the top grating structure and an overlay scan location including the top grating structure and the bottom grating structure.
    Type: Application
    Filed: July 1, 2020
    Publication date: January 6, 2022
    Inventors: Nadav Gutman, Oliver Ache, Carey Phelps