Abstract: A capacitive RF switch and DC RF switch include a fixed electrode having a thin layer of metal and at least one pull-down electrode. A moving plate has a plurality of corrugations and a selective finger design. The capacitive switch includes a selective finger that comes into contact with the fixed electrode so as to minimize the stiction between the moving plate and the fixed electrode when the switch is closed. The DC switch comprises a plurality of dimples that are formed on the selective portion of the moving plate and are positioned to come into contact with the fixed electrode when the switch is closed so as to increase the contact force and lower the resistance between the moving plate and fixed electrode.

Abstract: A deformable reflector includes a plurality of MEMS devices, each having an electrode membrane having a reflective surface thereon, a flat surface, and a pulldown electrode formed in the flat substrate. The electrode membrane has substantially a same flatness of the flat substrate when the electrode membrane comes into contact with the flat substrate across a majority of its surface area in response to a voltage being applied to the pulldown electrode. The electrode membrane has a two-dimensional curvature when no voltage is applied to the pulldown electrode.

Abstract: An apparatus for optical coupling between optical fibers and semiconductor waveguides and method of use thereof. The optical coupler comprises a tapered semiconductor structure having a cross section defined in a plane substantially perpendicular to a direction of propagation of light, which cross section has a dimension accurate to approximately 50 nanometer tolerance. The coupler has an optical index of refraction. The coupler has adjacent thereto material having an optical index less than that of the semiconductor, the adjacent material confining light within the semiconductor structure. In an exemplary embodiment, an optical communication device has two optical couplers disposed one at each end of a semiconductor waveguide to convey an optical communication from a source at one end to receiver at the other. In a further exemplary embodiment, a plurality of optical communication devices are disposed on a single semiconductor substrate.