Patents by Inventor Carl E. Merkel

Carl E. Merkel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Pellicle mounting apparatus
    Patent number: 6619359
    Abstract: The invention features an apparatus for mounting a pellicle to a reticle. The apparatus includes: a base; a first holder coupled to the base and including two edges positioned to support a first object below its center of gravity and secure the first object in substantially vertical alignment with the base, the first object including one of the pellicle and the reticle; a second holder slidably coupled to the base and including two edges positioned to support a second object below its center of gravity and secure the second object in substantially vertical alignment with the base, the second object including the other of the pellicle and the reticle; and a pressure applicator assembly slidably coupled to the base to adjustably apply pressure to a periphery of the second object held in the second holder and drive it against a corresponding periphery of the first object held in the first holder. In additional embodiments, the apparatus provides automated mounted of the pellicle and reticle.
    Type: Grant
    Filed: February 16, 2001
    Date of Patent: September 16, 2003
    Assignee: Brooks Automation, Inc.
    Inventors: Shane P. Ballard, Robert J. Viola, Carl E. Merkel, Robert Teissler
  • Pellicle mounting apparatus
    Publication number: 20020112824
    Abstract: The invention features an apparatus for mounting a pellicle to a reticle. The apparatus includes: a base; a first holder coupled to the base and including two edges positioned to support a first object below its center of gravity and secure the first object in substantially vertical alignment with the base, the first object including one of the pellicle and the reticle; a second holder slidably coupled to the base and including two edges positioned to support a second object below its center of gravity and secure the second object in substantially vertical alignment with the base, the second object including the other of the pellicle and the reticle; and a pressure applicator assembly slidably coupled to the base to adjustably apply pressure to a periphery of the second object held in the second holder and drive it against a corresponding periphery of the first object held in the first holder. In additional embodiments, the apparatus provides automated mounted of the pellicle and reticle.
    Type: Application
    Filed: February 16, 2001
    Publication date: August 22, 2002
    Inventors: Shane P. Ballard, Robert J. Viola, Carl E. Merkel, Robert Teissler