Patents by Inventor Carl E. Tedesco, II

Carl E. Tedesco, II has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Gas discharge laser with gas temperature control
    Patent number: 6034978
    Abstract: A gas discharge laser with fast response gas temperature control to maintain laser gas temperature within desired limits during burst mode operation. Preferred embodiments include a passive temperature stabilizer having fins with surface areas exposed to flowing laser gas at least equal to the surface area of the cooling fins of a laser gas heat exchanger. Preferred embodiments utilize heating elements and coolant flow control to regulate laser gas temperatures using processors programmed to anticipate idle periods.
    Type: Grant
    Filed: May 12, 1999
    Date of Patent: March 7, 2000
    Assignee: Cymer, Inc.
    Inventors: Richard C. Ujazdowski, Robert A. Shannon, Dmitry Berger, William N. Partlo, Tom A. Watson, Paul S. Thompson, Toshihiko Ishihara, Carl E. Tedesco, II, Donald G. Larson, Steven M. Harrington, Richard G. Morton, James H. Azzola, I. Roger Oliver, Thomas P. Duffey, Igor V. Fomenkov