Abstract: A device assembly (16) for a precision apparatus (10) includes a device housing (30), a device (32), a device mover assembly (34), and a measurement system (36). The device mover assembly (34) moves the device (32) relative to the device housing (30) about a first axis and about a second axis that is orthogonal to the first axis. The measurement system (36) monitors movement of the device (32). The measurement system (36) monitors movement of the device (32) and can include a first sensor assembly (260) that monitors movement about the first axis and a second sensor assembly (262) that monitors movement about a second axis. Each sensor assembly (260) (262) can include a sensor adjuster (474) (476) that adjusts the position of a portion of the respective sensor assembly (260) (262) to independently tune the sensor assemblies (260) (262) and independently enhance the performance of each sensor assembly (260) (262). Further, each sensor assembly (260) (262) can be a magnetic type sensor.

Abstract: An optical assembly (16) for a precision apparatus (10) includes an optical element (234) and a housing (230) that defines a housing cavity (244). The housing (230) includes a body section (238), a removable section (240) and a fastener assembly (242). The body section (238) is secured to an apparatus frame (12) of the precision apparatus (10). The removable section (240) retains the optical element (234) with the optical element (234) positioned in the housing cavity (244). The fastener assembly (242) selective secures the removable section (240) to the body section (238). With this design, the removable section (240) can be selectively removed to repair or replace the optical element (234) and the optical element (234) is supported by a rigid mechanical housing (230) so that the optical element (234) is less susceptible to long term or operating misalignments.

Abstract: A device assembly (16) for a precision apparatus (10) includes a device housing (30), a device (32), a device mover assembly (34), and a measurement system (36). The device mover assembly (34) moves the device (32) relative to the device housing (30) about a first axis and about a second axis that is orthogonal to the first axis. The measurement system (36) monitors movement of the device (32). The measurement system (36) monitors movement of the device (32) and can include a first sensor assembly (260) that monitors movement about the first axis and a second sensor assembly (262) that monitors movement about a second axis. Each sensor assembly (260) (262) can include a sensor adjuster (474) (476) that adjusts the position of a portion of the respective sensor assembly (260) (262) to independently tune the sensor assemblies (260) (262) and independently enhance the performance of each sensor assembly (260) (262). Further, each sensor assembly (260) (262) can be a magnetic type sensor.

Abstract: An optical assembly (16) for a precision apparatus (10) includes an optical element (234) and a housing (230) that defines a housing cavity (244). The housing (230) includes a body section (238), a removable section (240) and a fastener assembly (242). The body section (238) is secured to an apparatus frame (12) of the precision apparatus (10). The removable section (240) retains the optical element (234) with the optical element (234) positioned in the housing cavity (244). The fastener assembly (242) selective secures the removable section (240) to the body section (238). With this design, the removable section (240) can be selectively removed to repair or replace the optical element (234) and the optical element (234) is supported by a rigid mechanical housing (230) so that the optical element (234) is less susceptible to long term or operating misalignments.