Patents by Inventor Carl Spearow

Carl Spearow has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for detecting a plasma
    Publication number: 20050067102
    Abstract: The present invention presents an improved apparatus and method for monitoring a material processing system, where the material processing system includes a processing tool, test signal source, and a filter/detector. The test signal source providing a first test signal and a second test signal to the processing chamber, and the filter/detector detecting an intermodulation product of the first test signal and the second test signal generated when a plasma is created.
    Type: Application
    Filed: September 30, 2003
    Publication date: March 31, 2005
    Inventors: Craig Baldwin, Carl Spearow, Mirko Vukovic