Patents by Inventor Carl T. Petersen, III

Carl T. Petersen, III has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for precision surface modification in nano-imprint lithography
    Patent number: 8697189
    Abstract: A scalable, high-throughput nanoimprint lithography priming tool includes a dual-reactant chemical vapor deposition reactor chamber, a mandrel configured to hold a plurality of hard disks at an inner diameter of the hard disks, and a transport mechanism to move the plurality of hard disks into and out of the chamber. The tool may also include a transfer tool to transfer the plurality of hard disks to additional chambers for processing.
    Type: Grant
    Filed: October 1, 2009
    Date of Patent: April 15, 2014
    Assignee: Intevac, Inc.
    Inventors: Ren Xu, Carl T. Petersen, III, Charles Liu
  • METHOD AND APPARATUS FOR PRECISION SURFACE MODIFICATION IN NANO-IMPRINT LITHOGRAPHY
    Publication number: 20100098862
    Abstract: A scalable, high-throughput nanoimprint lithography priming tool includes a dual-reactant chemical vapor deposition reactor chamber, a mandrel configured to hold a plurality of hard disks at an inner diameter of the hard disks, and a transport mechanism to move the plurality of hard disks into and out of the chamber. The tool may also include a transfer tool to transfer the plurality of hard disks to additional chambers for processing.
    Type: Application
    Filed: October 1, 2009
    Publication date: April 22, 2010
    Applicant: INTEVAC, INC.
    Inventors: Ren XU, Carl T. PETERSEN, III, Charles LIU
  • Workpiece transfer mechanism
    Patent number: 4483654
    Abstract: A loadlock apparatus for a workpiece processing chamber such as those incorporated in vacuum processing systems. The apparatus includes an isolation chamber having evacuation apertures and workpiece transfer apertures with independently operable doors for closing and sealing the workpiece transfer apertures and an independent operable workpiece transfer mechanism. The doors and workpiece transfer mechanisms may be contained within the isolation chamber and the chamber may be closed and sealed while containing a workpiece. The door and workpiece transfer mechanisms may be adapted such that they are not positioned over the workpiece, thereby reducing the possibility of workpiece particulate contamination.The preferred embodiment of the workpiece transfer mechanism moves a workpiece through the isolation chamber along a path which is essentially a straight line.
    Type: Grant
    Filed: December 5, 1983
    Date of Patent: November 20, 1984
    Assignee: Lam Research Corporation
    Inventors: George R. Koch, Carl T. Petersen, III
  • Modular loadlock
    Patent number: 4433951
    Abstract: A loadlock apparatus for a workpiece processing chamber such as those incorporated in vacuum processing systems. The apparatus includes an isolation chamber having evacuation apertures and workpiece transfer apertures with independently operable doors for closing and sealing the workpiece transfer apertures and an independent operable workpiece transfer mechanism. The doors and workpiece transfer mechanisms may be contained within the isolation chamber and the chamber may be closed and sealed while containing a workpiece. The door and workpiece transfer mechanisms may be adapted such that they are not positioned over the workpiece, thereby reducing the possibility of workpiece particulate contamination.The preferred embodiment of the workpiece transfer mechanism moves a workpiece through the isolation chamber along a path which is essentially a straight line.
    Type: Grant
    Filed: February 13, 1981
    Date of Patent: February 28, 1984
    Assignee: Lam Research Corporation
    Inventors: George R. Koch, Carl T. Petersen, III