Patents by Inventor Carl Truyens

Carl Truyens has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11892493
    Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.
    Type: Grant
    Filed: October 7, 2020
    Date of Patent: February 6, 2024
    Assignee: KLA Corporation
    Inventors: Tom Marivoet, Carl Truyens, Christophe Wouters
  • Publication number: 20230393185
    Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.
    Type: Application
    Filed: August 14, 2023
    Publication date: December 7, 2023
    Inventors: Tom Marivoet, Carl Truyens, Christophe Wouters
  • Patent number: 11726126
    Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.
    Type: Grant
    Filed: December 10, 2021
    Date of Patent: August 15, 2023
    Assignee: KLA Corporation
    Inventors: Tom Marivoet, Carl Truyens, Christophe Wouters
  • Publication number: 20220099725
    Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.
    Type: Application
    Filed: December 10, 2021
    Publication date: March 31, 2022
    Inventors: Tom Marivoet, Carl Truyens, Christophe Wouters
  • Patent number: 11105839
    Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.
    Type: Grant
    Filed: November 2, 2020
    Date of Patent: August 31, 2021
    Assignee: KLA Corporation
    Inventors: Tom Marivoet, Carl Truyens, Christophe Wouters
  • Patent number: 11020862
    Abstract: A pick-and-place head for picking a plurality of work-pieces from at least one first location and for placing the plurality of work-pieces at least one second location is disclosed. The pick-and-place head exhibits a plurality of nozzles, wherein each nozzle is configured to engage one of the work-pieces by action of a vacuum. At least one nozzle has an individual vacuum supply and at least two further nozzles have a shared vacuum supply. A corresponding method is also disclosed, the method including the steps of approaching at least one of the plurality of work-pieces with a respective nozzle and then starting generation of a vacuum at each respective nozzle. The generation of vacuum in at least one nozzle is achieved by an individual vacuum supply, and generation of vacuum in at least two further nozzles is achieved by a shared vacuum supply of the at least two further nozzles.
    Type: Grant
    Filed: August 29, 2019
    Date of Patent: June 1, 2021
    Assignee: KLA-Tencor Corporation
    Inventor: Carl Truyens
  • Patent number: 10935503
    Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.
    Type: Grant
    Filed: June 17, 2019
    Date of Patent: March 2, 2021
    Assignee: KLA Corporation
    Inventors: Tom Marivoet, Carl Truyens, Christophe Wouters
  • Publication number: 20210048396
    Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.
    Type: Application
    Filed: November 2, 2020
    Publication date: February 18, 2021
    Inventors: Tom Marivoet, Carl Truyens, Christophe Wouters
  • Publication number: 20210018450
    Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.
    Type: Application
    Filed: October 7, 2020
    Publication date: January 21, 2021
    Inventors: Tom Marivoet, Carl Truyens, Christophe Wouters
  • Patent number: 10543600
    Abstract: A pick-and-place head for picking a plurality of work-pieces from at least one first location and for placing the plurality of work-pieces at least one second location is disclosed. The pick-and-place head exhibits a plurality of nozzles, wherein each nozzle is configured to engage one of the work-pieces by action of a vacuum. At least one nozzle has an individual vacuum supply and at least two further nozzles have a shared vacuum supply. A corresponding method is also disclosed, the method including the steps of approaching at least one of the plurality of work-pieces with a respective nozzle and then starting generation of a vacuum at each respective nozzle. The generation of vacuum in at least one nozzle is achieved by an individual vacuum supply, and generation of vacuum in at least two further nozzles is achieved by a shared vacuum supply of the at least two further nozzles.
    Type: Grant
    Filed: January 18, 2017
    Date of Patent: January 28, 2020
    Assignee: KLA-Tencor Corporation
    Inventor: Carl Truyens
  • Publication number: 20190381674
    Abstract: A pick-and-place head for picking a plurality of work-pieces from at least one first location and for placing the plurality of work-pieces at least one second location is disclosed. The pick-and-place head exhibits a plurality of nozzles, wherein each nozzle is configured to engage one of the work-pieces by action of a vacuum. At least one nozzle has an individual vacuum supply and at least two further nozzles have a shared vacuum supply. A corresponding method is also disclosed, the method including the steps of approaching at least one of the plurality of work-pieces with a respective nozzle and then starting generation of a vacuum at each respective nozzle. The generation of vacuum in at least one nozzle is achieved by an individual vacuum supply, and generation of vacuum in at least two further nozzles is achieved by a shared vacuum supply of the at least two further nozzles.
    Type: Application
    Filed: August 29, 2019
    Publication date: December 19, 2019
    Inventor: Carl Truyens
  • Publication number: 20190302033
    Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.
    Type: Application
    Filed: June 17, 2019
    Publication date: October 3, 2019
    Inventors: Tom Marivoet, Carl Truyens, Christophe Wouters
  • Patent number: 10324044
    Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.
    Type: Grant
    Filed: July 1, 2016
    Date of Patent: June 18, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Tom Marivoet, Carl Truyens, Christophe Wouters
  • Patent number: 10190994
    Abstract: An apparatus, a method and a computer program product for inspecting at least side faces of a semiconductor device are disclosed. A frame construction is provided, which holds a camera, defining an imaging beam path. The semiconductor device is inserted into a mirror block. The mirror block has a first mirror, a second mirror, a third mirror and a fourth mirror, wherein the mirrors are arranged such that they surround a free space in the form of a rectangle. The opposing first mirror and third mirror are fixedly mounted and the opposing second mirror and fourth mirror movably mounted. A tilted mirror directs an image of the side faces of the semiconductor substrate generated by the mirror block to the camera.
    Type: Grant
    Filed: September 14, 2016
    Date of Patent: January 29, 2019
    Assignee: KLA-Tencor Corporation
    Inventor: Carl Truyens
  • Patent number: 9783372
    Abstract: A flipping apparatus, a system for processing articles comprising a said flipping apparatus, and a method for processing articles are provided. An article is picked by a first flipping arm. The first flipping arm rotates from a pick position into a pass position, at which the article is passed to a second flipping arm, which is in a receive position. The second flipping arm rotates from the receive position to a place position and places the article. By the passing of the article from the first to the second flipping arm and the rotations a flipping of the article is achieved. The first flipping arm and the second flipping arm each rotate at a higher speed when not carrying an article than when carrying an article. In addition, first and/or second flipping arm may perform a translation movement.
    Type: Grant
    Filed: March 21, 2016
    Date of Patent: October 10, 2017
    Assignee: KLA-Tencor Corporation
    Inventors: Erik De Block, Carl Truyens
  • Patent number: 9776334
    Abstract: An apparatus for automatic pitch conversion for pick and place heads, comprising at least one auto pitch station for adjusting a pitch in a X-coordinate direction and/or adjusting a pitch in a Y-coordinate direction of pickers/grippers of a pick and place heads; a first actuator, operated by a motor gear assembly of the at least one auto pitch station, wherein the first actuator changes the pitch in the X-coordinate direction distance between rows of pickers/grippers of the respective pick and place head; and a second actuator operated by the same motor gear assembly, wherein the second actuator changes the pitch in the Y-coordinate direction between the pickers/grippers within a row of the respective pick and place head. A method for automatic pitch conversion of pick and place heads and a pick and place head and a pick and place device.
    Type: Grant
    Filed: April 2, 2014
    Date of Patent: October 3, 2017
    Assignee: KLA-Tencor Corporation
    Inventors: Bert Vangilbergen, Erik De Block, Jimmy Vermeulen, KW Cheung, KC Leung, Bruno Accou, Carl Truyens, Karel Van Gils
  • Publication number: 20170120452
    Abstract: A pick-and-place head for picking a plurality of work-pieces from at least one first location and for placing the plurality of work-pieces at least one second location is disclosed. The pick-and-place head exhibits a plurality of nozzles, wherein each nozzle is configured to engage one of the work-pieces by action of a vacuum. At least one nozzle has an individual vacuum supply and at least two further nozzles have a shared vacuum supply. A corresponding method is also disclosed, the method including the steps of approaching at least one of the plurality of work-pieces with a respective nozzle and then starting generation of a vacuum at each respective nozzle. The generation of vacuum in at least one nozzle is achieved by an individual vacuum supply, and generation of vacuum in at least two further nozzles is achieved by a shared vacuum supply of the at least two further nozzles.
    Type: Application
    Filed: January 18, 2017
    Publication date: May 4, 2017
    Inventor: Carl Truyens
  • Patent number: 9586325
    Abstract: A pick-and-place head for picking a plurality of work-pieces from at least one first location and for placing the plurality of work-pieces at least one second location is disclosed. The pick-and-place head exhibits a plurality of nozzles, wherein each nozzle is configured to engage one of the work-pieces by action of a vacuum. At least one nozzle has an individual vacuum supply and at least two further nozzles have a shared vacuum supply. A corresponding method is also disclosed, the method including the steps of approaching at least one of the plurality of work-pieces with a respective nozzle and then starting generation of a vacuum at each respective nozzle. The generation of vacuum in at least one nozzle is achieved by an individual vacuum supply, and generation of vacuum in at least two further nozzles is achieved by a shared vacuum supply of the at least two further nozzles.
    Type: Grant
    Filed: January 12, 2015
    Date of Patent: March 7, 2017
    Assignee: KLA-Tencor Corporation
    Inventor: Carl Truyens
  • Publication number: 20170003231
    Abstract: An apparatus, a method and a computer program product for inspecting at least side faces of a semiconductor device are disclosed. A frame construction is provided, which holds a camera, defining an imaging beam path. The semiconductor device is inserted into a mirror block. The mirror block has a first mirror, a second mirror, a third mirror and a fourth mirror, wherein the mirrors are arranged such that they surround a free space in the form of a rectangle. The opposing first mirror and third mirror are fixedly mounted and the opposing second mirror and fourth mirror movably mounted. A tilted mirror directs an image of the side faces of the semiconductor substrate generated by the mirror block to the camera.
    Type: Application
    Filed: September 14, 2016
    Publication date: January 5, 2017
    Inventor: Carl Truyens
  • Publication number: 20160313257
    Abstract: An apparatus, a method and a computer program product for defect detection in work pieces is disclosed. At least one light source is provided and the light source generates an illumination light of a wavelength range at which the work piece is transparent. A camera images the light from at least one face of the work piece on a detector of the camera by means of a lens. A stage is used for moving the work piece and for imaging the at least one face of the semiconductor device completely with the camera. The computer program product is disposed on a non-transitory, computer readable medium for defect detection in work pieces. A computer is used to execute the various process steps and to control the various means of the apparatus.
    Type: Application
    Filed: July 1, 2016
    Publication date: October 27, 2016
    Inventors: Tom Marivoet, Carl Truyens, Christophe Wouters