Abstract: A microminiature pump for use in the eye or other location in the human body. The pump is fabricated from crystalline silicon using semiconductor fabrication techniques such as impurity diffusion and anisotropic etching. The pump utilizes a thin, etched, diaphragm which is actuated with electromagnetic or electrostatic forces, to provide the pumping action. Diaphragm or ball check valves at the inlet and outlet are also fabricated with semiconductor materials and techniques.