Abstract: Systems and methods are described for a wireless instrumented silicon wafer that can measure temperatures at various points and transmit those temperature readings to an external receiver. The device has particular utility in the processing of semiconductor wafers, where it can be used to map thermal uniformity on hot plates, cold plates, spin bowl chucks, etc. without the inconvenience of wires or the inevitable thermal perturbations attendant with them.

Abstract: A load sensing system inexpensively monitors the weight and temperature of stored nuclear material for long periods of time in widely variable environments. The system can include an electrostatic load cell that encodes weight and temperature into a digital signal which is sent to a remote monitor via a coaxial cable. The same cable is used to supply the load cell with power. When multiple load cells are used, vast inventories of stored nuclear material can be continuously monitored and inventoried of minimal cost.

Abstract: A portable microwave instrument for evaluating characteristics of a structural member includes a source of microwave energy, a transmitter coupled to the source of microwave energy for transmitting a microwave signal at the structural member, and a receiver positioned on the same side of the structural member as the transmitter and being disposed to receive a microwave signal reflected by the structural member. A phase angle difference is determined between the transmitted microwave signal and the received microwave signal using a signal splitter and a balanced mixer. The difference in phase angle varies in accordance with differences in size, shape and locations of constituent materials within the structural member.