Abstract: An apparatus and method for dispensing thermally conductive paste into the blind holes of a cold plate, and the insertion of pistons into those blind holes and in engagement with and to be coated by the thermal paste is described. The thermal paste is extruded from a carrier plate into the blind holes by the pistons to form the finished assembly of the cold plate under conditions of a vacuum to eliminate entrapped air or gases, which either would expand when the cold plate assembly was positioned within a vacuum chamber of a thermally conductive module or would impede heat transfer between the piston and the cold plate.

Abstract: In a thermal conduction cooling system used in electronic packaging having a hermetic seal and sealing force between a substrate with mounted electronic devices and a cooling cap to prevent the corrosion of the mounted electronic devices during their operation, an improved seal employing an acrylic film which acts both as a hermetic seal and as an adhesive to provide a suitable sealing force between the cold plate and substrate.

Abstract: In an electronic package, improved disk shaped thermal bridge elements provide multiple conductive paths between devices to be cooled and a cold plate. The thermal bridge elements are disks progressively stacked and having bulge shapes and radial finger contacts for providing multiple compliant heat conduction paths between each device and a cold plate.

Abstract: An apparatus and method for removably mounting heat sinks on a chip carrying substrate by simultaneously applying pressure to both the heat sinks and the substrate. Also disclosed is a three dimensional heat sink having a plurality of spatially interconnected holes formed therein. The holes act as extended boiling surfaces which also promote agitation induced by bubble motion.

Abstract: An apparatus for removing heat from a heat generating device. The apparatus includes at least one heat conductive finned thermal device insert including a base having at least one first fin, and preferably haing a plurality of first fins, on a first surface and a second surface which is flat and a heat conductive second thermal device, preferably a cooling hat, having a plurality of second fins. The first fins are interspersed with the second fins. At least one of the first and second fins is of a thermally conductive, flexible material so that a gap otherwise existing between the interspersed fins is substantially eliminated. Finally, at least a portion of the first and second fins are biased against one another.

Abstract: A fluid application system which is useful for the subjection of substantially planar objects to various fluids for cleaning, etching, photoresist developing and the like. The system includes a chamber which has at least one agitation mechanism. The agitation mechanism includes an orificed plate positioned on one side of one or more of the planar objects. Means are provided for moving the fluid through the orificed plate with a pulsating motion. The agitation mechanism can either be substantially within the chamber or form one or more of the sides of the chamber. The agitation mechanism includes in addition to the orificed plate, a pneumatic chamber, a fluid chamber, a flexible diaphragm between the pneumatic and fluid chambers, and a piston being movable within the agitation mechanism to force the fluid through the orificed plate with the pulsating motion.

Abstract: A high speed positioning device having a lead screw, a slidable frame and a screw engaging roller assembly supported by the frame for axial movement along the screw. The screw engaging roller assembly includes a pair of opposed rollers supported by a pair of pivoted, spring biased roller carriers which urge the rollers into meshing engagement with the lead screw to move the assembly and consequently the frame relative to the screw as the screw is rotated relative to the frame. Each roller has two degrees of rotational freedom with respect to its associated roller carrier to follow the helical threads of the lead screw. This arrangement provides an anti-backlash coupling between the lead screw and the screw roller assembly, thereby permitting accurate high speed positioning of parts, probes, machine tools and the like.