Patents by Inventor CarlE. E. Hess

CarlE. E. Hess has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • INSPECTION OF PHOTOMASKS BY COMPARING TWO PHOTOMASKS
    Publication number: 20180238816
    Abstract: Disclosed are methods and systems for inspecting photolithographic reticles. A first and second reticle that were fabricated with a same design are obtained. A first and second reticle image of the first and second reticles are also obtained. The first reticle image is compared to the second reticle image to output a difference image having a plurality of difference events corresponding to candidate defects on either the first or second reticle. An inspection report of the candidate defects is then generated.
    Type: Application
    Filed: February 21, 2017
    Publication date: August 23, 2018
    Applicant: KLA-Tencor Corporation
    Inventors: Weston L. Sousa, Yalin Xiong, CarlE. E. Hess